<div><div dir="auto">Dear Neal,</div></div><div dir="auto">We have 2 angstrom tools in our cleanroom <div><a href="http://cni.columbia.edu/equipment-list">http://cni.columbia.edu/equipment-list</a></div></div><div dir="auto">1. I’m not sure about the chamber type, I was not present during the purchasing process. One of the tools has e-beam, sputter, thermal and plasma pre-deposition clean capabilities. The other is a low (10^-9 torr) vacuum e-beam. Both are used for liftoff including pmma. We did have few issues of pmma blistering during Pt deposition but it was resolved after adjusting the beam sweep parameters.</div><div dir="auto">2. The customer service is excellent. Very responsive and helpful. </div><div dir="auto">3. Both of our tools have different GUIs (one is newer than the other) but both do a great job. Most users don’t even look into the chamber during deposition and I can not recall the last time we had a problem. We do have a procedure of weekly chamber maintenance where the crucibles are checked and filled.</div><div dir="auto"><br></div><div dir="auto">Best,</div><div dir="auto">Youry</div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Mar 19, 2020 at 4:18 PM NEAL, ADAM T DR-02 USAF AFMC AFRL/RXAN <<a href="mailto:adam.neal.3@us.af.mil">adam.neal.3@us.af.mil</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
<div lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="m_-6435567028355312932WordSection1">
<p class="MsoNormal">Labnetwork,<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">My organization is considering purchase of a metallization tool (electron-beam evaporation and pulsed DC sputtering combination) from Angstrom Engineering (<a href="http://angstromengineering.com" target="_blank">angstromengineering.com</a>), and I wanted to solicit feedback from list members who
have experience with Angstrom’s tools. In addition to general feedback, I’m also looking for information on the following from any list members who have used or maintained Angstrom’s e-beam evaporation or sputtering tools:<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="m_-6435567028355312932MsoListParagraph"><u></u><span>1.<span style="font:7.0pt "Times New Roman"">
</span></span><u></u>Do you and your users have a successful track record of performing electron-beam evaporation and liftoff with Angstrom tools, including PMMA resist? We have been quoted for a “Nebula” chamber, so I’d love to hear from anyone who has
direct experience with that chamber geometry.<u></u><u></u></p>
<p class="m_-6435567028355312932MsoListParagraph"><u></u><span>2.<span style="font:7.0pt "Times New Roman"">
</span></span><u></u>What has your experience been like with Angstrom’s customers service?<u></u><u></u></p>
<p class="m_-6435567028355312932MsoListParagraph"><u></u><span>3.<span style="font:7.0pt "Times New Roman"">
</span></span><u></u>What is your experience of the control/automation software on the system? Once the sample is loaded, can how much user intervention is required if a recipe is already developed?<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Please send your feedback directly to me at <a href="mailto:adam.neal.3@us.af.mil;adam.t.neal@gmail.com?subject=Re:%20Angstrom%20Engineering" title="mailto:adam.neal.3@us.af.mil;adam.t.neal@gmail.com" target="_blank">
adam.neal.3@us.af.mil;adam.t.neal@gmail.com</a>. Thank you in advance for any feedback you can provide.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Adam T. Neal, Ph.D.<u></u><u></u></p>
<p class="MsoNormal">Research Electrical Engineer <u></u><u></u></p>
<p class="MsoNormal">Acting Research Team Lead<u></u><u></u></p>
<p class="MsoNormal">Agile RF Electronics Team <u></u><u></u></p>
<p class="MsoNormal">Materials and Manufacturing Directorate <u></u><u></u></p>
<p class="MsoNormal">Air Force Research Laboratory <u></u><u></u></p>
<p class="MsoNormal">E-mail: <a href="mailto:adam.neal.3@us.af.mil;adam.t.neal@gmail.com?subject=Re:%20Angstrom%20Engineering" title="mailto:adam.neal.3@us.af.mil;adam.t.neal@gmail.com" target="_blank">
adam.neal.3@us.af.mil;adam.t.neal@gmail.com</a><u></u><u></u></p>
</div>
</div>
_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" rel="noreferrer" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br>
</blockquote></div></div>