<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">Hi Zuzanna,<div class=""><br class=""></div><div class="">We have implemented essentially the same solution Mac describes here, and find the pre-pump filter does extend pump operational life.</div><div class=""><br class=""></div><div class="">One modification: we have our exhaust routed through a dry scrubber in the new cleanroom here at Rice, which is may not be entirely necessary, but we had a convenient point of connection and capacity to spare. It actually saved us having to run an additional non-scrubbed exhaust header.</div><div class=""><br class=""></div><div class="">The exhaust systems are much better than Rice's old facility that I’m sure you remember all too well.</div><div class=""><br class=""></div><div class="">Best of luck,<br class=""><div class="">
<div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class=""><br class="">-- <br class="">Tim Gilheart, Ph.D.<br class="">Research Scientist - Nanofabrication Cleanroom Manager,<br class="">Shared Equipment Authority (SEA), Rice University<br class="">Cell: 832-341-5488 | Office: 713-348-3159 | <a href="mailto:gilheart@rice.edu" class="">gilheart@rice.edu</a><br class=""></div>
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<div><br class=""><blockquote type="cite" class=""><div class="">On Mar 28, 2020, at 9:08 AM, Hathaway, Malcolm R <<a href="mailto:hathaway@cns.fas.harvard.edu" class="">hathaway@cns.fas.harvard.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Hi Zuzanna,</div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">We vent our exhaust from our fomblin-base pump into our general exhaust (not sure at the moment if it's the solvent or acid-gas exhaust, we're shut down at the moment).<span class="Apple-converted-space"> </span><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">The volumes of process gas involved are miniscule if your recipe are set up correctly, so that very little abatement is necessary, compared to what one expects for a CVD system.</div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">What many manufacturers are doing these days (an easy retrofit, as well) is to place a mist filter just prior to the pump, which provides a large surface for "wetting out" of any excess precursor, thus allowing this precursor to react into oxide (generally) before entering the pump. This reduces the volume of reactive gases still further, and keeps your pump happy for a longer period. The reaction products coat the filter element, which gets cleaned or changed out every few years.<br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Do you plan to install a commercial system, or a home-made one?<br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Mac Hathaway<br class=""></div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Senior Process and Systems Engineer</div><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Harvard CNS<br class=""></div><div id="appendonsend" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""></div><hr tabindex="-1" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; display: inline-block; width: 644.828125px;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class=""></span><div id="divRplyFwdMsg" dir="ltr" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><font face="Calibri, sans-serif" style="font-size: 11pt;" class=""><b class="">From:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu" class="">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Zuzanna A. Lewicka <<a href="mailto:zlewicka@princeton.edu" class="">zlewicka@princeton.edu</a>><br class=""><b class="">Sent:</b><span class="Apple-converted-space"> </span>Friday, March 27, 2020 5:47 PM<br class=""><b class="">To:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>><br class=""><b class="">Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] ALD venting precautions</font><div class=""> </div></div><div lang="EN-US" link="#0563C1" vlink="#954F72" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><div class="x_WordSection1"><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Dear Labnetwork Community,</div><p class="x_xmsonormal" style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;"> </p><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">We are trying to get more information about appropriate venting precautions (e.g. proper exhaust abatement<span class="Apple-converted-space"> </span><span class="x_st">system</span><span class="Apple-converted-space"> </span>or just heated ALD trap) for Thermal Atomic Layer Deposition System configured for alumina, hafnia and titania on Si, GaAs, and InP substrates. We would appreciate if you could share your experiences and solutions at your facilities.</div><p class="x_MsoNormal" style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;"> </p><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Thank you,</div><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Zuzanna Lewicka</div><p class="x_MsoNormal" style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;"> </p><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Senior Research Specialist</div><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Princeton Institute for the Science and Technology of Materials (PRISM) Cleanroom</div><div style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;" class="">Email:<span class="x_xxmsohyperlink"><span style="font-family: Calibri, sans-serif;" class=""> </span></span><a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__owa.princeton.edu_owa_redir.aspx-3FC-3D-5Fobjl9mq7yUMTgAiqvOi4fXDy7oF3uDvC7guzRPqpQi1k7GZDK-5FVCA..-26URL-3Dmailto-253azlewicka-2540princeton.edu&d=DwMFAg&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=H2eHOHgwCSx5yx4sT24izIBIbxGKsmMOVUcp73oX52w&s=BguTXvbuS_Wr5MDvs33YNFVxFo7buP3du3f2BySz0-k&e=" target="_blank" id="LPlnk845421" style="color: rgb(149, 79, 114); text-decoration: underline;" class=""><span style="font-family: Calibri, sans-serif;" class="">zlewicka@princeton.edu</span></a></div><p class="x_MsoNormal" style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;"> </p><p class="x_MsoNormal" style="margin: 0in 0in 0.0001pt; font-size: 12pt; font-family: "Times New Roman", serif;"><span style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""> </span></p></div></div><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class="">_______________________________________________</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class="">labnetwork mailing list</span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class=""><a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a></span><br style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class=""><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" class="">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a></span></div></blockquote></div><br class=""></div></body></html>