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--></style></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal>Hi Gloria,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I recently completed an undergraduate thesis on developing a cryogenic DRIE process using SF6 + O2 at -100 °C chamber temperature on an Oxford Plasmalab 100 ICP-RIE. I achieved aspect ratios up to 18:1 for a 20:00 min etch, meaning it would likely be >20:1 if I increased the etch time.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Because my test samples were <4 in., I had to use a thermal grease between the 4 in. carrier wafer and my test sample. This has potential for chamber contamination, but is easily controlled by careful preparation. Otherwise, the process seems quite safe for the chamber and user.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Attached is my thesis for you to read through, along with relevant cryogenic DRIE literature. Feel free to contact me if you have any questions.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='color:black'>Ethan Morse<o:p></o:p></span></p><p class=MsoNormal><span style='color:black'><a href="https://aggiefab.tamu.edu/">Texas A&M AggieFab Nanofabrication Facility</a><o:p></o:p></span></p><p class=MsoNormal><span style='color:black'>ethan.morse97@gmail.com</span><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:12.0pt;color:black'>From: </span></b><span style='font-size:12.0pt;color:black'>Larry Rehn <larry.rehn@att.net><br><b>Date: </b>Monday, April 6, 2020 at 16:24<br><b>To: </b>Ethan Morse <ethan.morse97@gmail.com><br><b>Subject: </b>Fw: [labnetwork] [ICP-RIE] low temperature pseudo-Bosch process<o:p></o:p></span></p></div><div><p class=MsoNormal><o:p> </o:p></p></div><div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'>Hey Ethan,<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'>Do you want to share your experience (and maybe report) for the benefit of the university lab network? See question below from Sydney, Australia, using Oxford RIE tool.<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'><o:p> </o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'>Larry<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Helvetica Neue"'><o:p> </o:p></span></p></div></div><div id="ydp4bbcb772yahoo_quoted_6338365917"><div><div><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>----- Forwarded Message -----<o:p></o:p></span></p></div><div><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>From:</span></b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> Gloria Qiu <gloria.qiu@sydney.edu.au><o:p></o:p></span></p></div><div><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>To:</span></b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><o:p></o:p></span></p></div><div><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Sent:</span></b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> Sunday, April 5, 2020, 06:36:38 PM CDT<o:p></o:p></span></p></div><div><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Subject:</span></b><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> [labnetwork] [ICP-RIE] low temperature pseudo-Bosch process<o:p></o:p></span></p></div><div><p class=MsoNormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'><o:p> </o:p></span></p></div><div><div id=ydp4bbcb772yiv4839565442><div><div><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Dear all,<o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>We have received requests to run the pseudo-Bosch (SF6+C4F8) process at -5C to -50C on Oxford ICP-RIE 100s and I am very concerned because:<o:p></o:p></span></p><ul type=disc><li class=ydp4bbcb772yiv4839565442msolistparagraph style='color:#26282A;mso-list:l0 level1 lfo1'><span style='font-size:10.0pt;font-family:"Helvetica Neue"'>Oxford suggests to run it at >5C since condensation might affect pumping speed;<o:p></o:p></span></li><li class=ydp4bbcb772yiv4839565442msolistparagraph style='color:#26282A;mso-list:l0 level1 lfo1'><span style='font-size:10.0pt;font-family:"Helvetica Neue"'>The C4F8 in the process might condense on the sample in low temperature;<o:p></o:p></span></li><li class=ydp4bbcb772yiv4839565442msolistparagraph style='color:#26282A;mso-list:l0 level1 lfo1'><span style='font-size:10.0pt;font-family:"Helvetica Neue"'>As I understand the cryogenic Si etch uses SF6+O2, not the C4F8.<o:p></o:p></span></li></ul><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>I am wondering if you have any experience running this process in low temperatures, below zero degree in particular.<o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Any comment is appreciated.<o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Thank you & stay safe.<o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Best,<o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'> <o:p></o:p></span></p><p class=ydp4bbcb772yiv4839565442msonormal><span style='font-size:10.0pt;font-family:"Helvetica Neue";color:#26282A'>Gloria<o:p></o:p></span></p><p 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