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<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Hi,,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Here at Draper we have used an E-Beam evaporator to deposit Ru. We clean our source chamber weekly by peeling large flakes and use an HEPA vacuum to remove small particles and other flakes.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">We did not have a big problem with dust. Our chamber is lined with foil and changed out on a regular basis. When we remove the foil we are very careful about removing it to not start a fire,
we evaporate a lot of Ti and we have had a fire before cleaning out a sputter tool. Just be careful.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Richard H. Morrison<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Principal Member of the Technical Staff<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Draper<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Cambridge, MA<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">02139-3573<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Work 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Cell 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><a href="http://www.draper.com"><span style="color:#0563C1">www.draper.com</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt">From:</span></b><span style="font-size:11.0pt"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Chen, Hang<br>
<b>Sent:</b> Tuesday, April 14, 2020 4:44 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Ruthenium evaporation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hi, Everyone<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I hope you are safe at home.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">A user needs to evaporator Ruthenium in our cleanroom, the SDS states that the dust is combustible. Does anyone has experience with the process? What would be the best way to run it safely.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hang<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">-- <o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Times New Roman",serif">Hang Chen, Ph.D.<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Times New Roman",serif">Process Support Manager</span></b><span style="font-size:11.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">The Institute for Electronics and Nanotechnology at Georgia Tech<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">345 Ferst Drive, Atlanta GA, 30332 | 1152<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">404.894.3360 |
<a href="mailto:hang.chen@ien.gatech.edu">hang.chen@ien.gatech.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif"><a href="https://sums.gatech.edu">https://sums.gatech.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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