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<p class="MsoNormal"><span style="font-size:11.0pt">Hi, Everyone<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">I hope you are safe at home.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">A user needs to evaporator Ruthenium in our cleanroom, the SDS states that the dust is combustible. Does anyone has experience with the process? What would be the best way to run it safely.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt">Hang<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">-- <o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Times New Roman",serif">Hang Chen, Ph.D.<o:p></o:p></span></b></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Times New Roman",serif">Process Support Manager</span></b><span style="font-size:11.0pt;font-family:"Times New Roman",serif"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">The Institute for Electronics and Nanotechnology at Georgia Tech<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">345 Ferst Drive, Atlanta GA, 30332 | 1152<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">404.894.3360 |
<a href="mailto:hang.chen@ien.gatech.edu"><span style="color:#0563C1">hang.chen@ien.gatech.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Times New Roman",serif">https://sums.gatech.edu<o:p></o:p></span></p>
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