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<p><span style="font-family: Calibri, Helvetica, sans-serif, serif, EmojiFont;">Colleagues,</span><br>
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Hope you are all keeping safe and healthy.</p>
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We have a potential project mainly involving ALD on CdZnTe substrates. I know that CZT is quite soft and brittle, and chips easily. We would use an inline HEPA filter to minimize the contamination of our exhaust system. We would also use a HEPA vacuum to clean
up any potential particles in the load-lock. What other measures do we need to consider? In terms of the PPE and the tool/facility? </p>
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Hadi</p>
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<div>Hadi Esmaeilsabzali, PhD</div>
<div>4D LABS, SFU</div>
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