<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=utf-8">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Consolas;
panose-1:2 11 6 9 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p
{mso-style-priority:99;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
pre
{mso-style-priority:99;
mso-style-link:"HTML Preformatted Char";
margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Courier New";}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.HTMLPreformattedChar
{mso-style-name:"HTML Preformatted Char";
mso-style-priority:99;
mso-style-link:"HTML Preformatted";
font-family:"Consolas",serif;}
span.EmailStyle22
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:#1F497D;}
span.EmailStyle23
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri",sans-serif;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Aaron,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The State of Ohio has a schedule for testing/measuring/auditing all x-ray producing devices (dentistry x-rays, XRDs, electron microscopes, etc.). The electron
microscopes are a category in themselves and they eventually considered our ebeam evaporators in the same category (along with my 100kV electron beam lithography tool). Even though they knew that the voltage on the evaporators was much lower than the SEMs/EBL,
they maintained them in that category. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">For many years our University EHS radiation safety officer would measure/audit these equipment yearly, the State every 3 years. Never once were any of the measurements
above background. Eventually, they no longer required them to be measured/audited. New instruments and any significant modifications to existing instruments, likely still require an initial measurement by our safety officer. Typically, the instrument vendors
require this as well as part of the tool qualification (although maybe not for ebeam evaporators).
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We were required to train our users on the hazards of x-ray, the signs/symptoms of exposure, and give notice of which tools generate them. I wrote a spec/document
from which we trained and can share it with you off-line if you’d like. It does have a lot of specifics to the State of Ohio, but it’ll give you an idea. We required that users be “certified” in both the x-ray safety document as well as the specific tool
before they could use any system that generated x-rays. My feeling was that it is good for users to be aware of this for their education, even knowing that the risk was low. Many of them will be tool owners themselves at some point and it is good to consider,
the “you don’t know what you don’t know” mentality. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Long story short, if you have any questions your equipment vendor should have answers on this topic. What shielding or safety measures, if any, they use and
how they were determined would give most users a good understanding and comfort in their safety.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Aimee Bross Price<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Sr. Research Associate
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">The Ohio State University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Nanotech West Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Institute for Materials Research<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">1381 Kinnear Road<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Suite 100<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Columbus, OH 43212<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">614-292-2753<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Aaron Hryciw<br>
<b>Sent:</b> Friday, May 29, 2020 11:11 AM<br>
<b>To:</b> Stephen Howe <info@fabsurplus.com><br>
<b>Cc:</b> labnetwork@mtl.mit.edu; Robert Vandusen <RobertVandusen@cunet.carleton.ca><br>
<b>Subject:</b> Re: [labnetwork] Hazard due to x-ray production in e-beam evaporators?<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Dear colleagues, <o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Thank-you all for the excellent discussion and suggestions—this has been incredibly helpful. Beyond allaying the fears of the user who raised the concern, going forward, we will be sure to incorporate an explanation of these considerations
when training users on our evaporators.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Stay safe and healthy.<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Cheers, <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal"> – Aaron<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><u><span style="font-size:10.0pt"> </span></u><span style="font-size:10.0pt"> </span><o:p></o:p></p>
</div>
<div>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Aaron Hryciw, PhD, PEng</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Fabrication Group Manager</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 780-940-7938</span><span style="font-size:7.5pt"><o:p></o:p></span></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://urldefense.com/v3/__http:/www.nanofab.ualberta.ca/__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcdvZb9pI$" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a>
</span><o:p></o:p></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<div>
<p class="MsoNormal">On Fri, May 29, 2020 at 4:38 AM Stephen Howe <<a href="mailto:info@fabsurplus.com">info@fabsurplus.com</a>> wrote:<o:p></o:p></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0in 0in 0in 6.0pt;margin-left:4.8pt;margin-right:0in">
<div>
<p class="MsoNormal"><span lang="EN-CA">Dear Aaron,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">I used to work on Mass Spectrometers for VG Analytical, which became part of Thermo Instruments eventually.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">They had a low accelerating voltage of 8KV, but we had some tools with a FIB option installed (Fast Ion Bombardment), and that operated at up to 16 KV.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">We had a viewport above the source area, so as to have a reality check on what was really going as one poked around inside the vacuum chamber. The viewport had leaded glass. This might be erring on the side of excessive
caution, but such view port glasses are readily available for purchase in the market place, so that's what I'd suggest.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<pre><span lang="EN-CA">-- <o:p></o:p></span></pre>
<p><span lang="EN-CA" style="font-family:"Arial",sans-serif"><img border="0" id="_x0000_i1025" src="https://WWW.fabsurplus.com/graphics/logo20.gif" alt="SDI Fabsurplus 20 years"><br>
</span><strong><span lang="EN-CA" style="font-size:13.5pt;font-family:"Arial",sans-serif;color:#047D15">SDI Fabsurplus LLC</span></strong><span lang="EN-CA" style="font-family:"Arial",sans-serif"><br>
<strong><span style="font-family:"Arial",sans-serif">Stephen Howe</span></strong>
<br>
Company Owner<br>
email: <a href="mailto:info@fabsurplus.com" target="_blank"><span style="color:#047D15">info@fabsurplus.com</span></a><br>
Mobile: +1 830-388-1071<br>
Skype: <span style="color:#047D15">stephencshowe</span><br>
<a href="https://urldefense.com/v3/__https:/WWW.fabsurplus.com__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtc8WiGGwo$" target="_blank"><strong><span style="font-family:"Arial",sans-serif">WWW.FABSURPLUS.COM</span></strong></a>
<br>
Linkedin: <a href="https://urldefense.com/v3/__https:/www.linkedin.com/company/sdi-fabsurplus__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcQ1-LNcs$" target="_blank">
<span style="color:#047D15">https://www.linkedin.com/company/sdi-fabsurplus</span></a>
<br>
Twitter: <a href="https://urldefense.com/v3/__https:/twitter.com/fabsurplus__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcBxc9vmw$" target="_blank">
<span style="color:#047D15">https://twitter.com/fabsurplus</span></a> <br>
Instagram: <a href="https://urldefense.com/v3/__https:/www.instagram.com/fabsurplus/__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcOpKyyvw$" target="_blank"><span style="color:#047D15">www.instagram.com/fabsurplus</span></a>
<br>
Facebook: <a href="https://urldefense.com/v3/__https:/www.facebook.com/fabsurplus__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcfvZL9-k$" target="_blank"><span style="color:#047D15">www.facebook.com/fabsurplus</span></a><o:p></o:p></span></p>
<div>
<p><strong><span lang="EN-CA" style="font-family:"Arial",sans-serif">Featured Sales Items:-</span></strong><span lang="EN-CA" style="font-family:"Arial",sans-serif"><o:p></o:p></span></p>
<p><span lang="EN-CA" style="font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-family:"Arial",sans-serif"><a href="https://urldefense.com/v3/__https:/WWW.fabsurplus.com/blog/closed-bid-warehouse-clearance-may-2020/__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcuLg3I00$" target="_blank">Fabsurplus.com
Closed-Bid Warehouse Clearance Sale May 2020</a><o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA" style="font-family:"Arial",sans-serif"><br>
<a href="https://urldefense.com/v3/__https:/WWW.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=99292__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcUI-hGJQ$" target="_blank">Applied Materials Centura 5200 EPI HTF-EPI Deposition,
3 CH ATM 200 mm</a><br>
<br>
<a href="https://urldefense.com/v3/__https:/WWW.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=99378__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcc0SA58w$" target="_blank">Axcelis NV-GSD-200E2 Medium Current Ion Implanter, 180kV,
150 mm</a><o:p></o:p></span></p>
<p><strong><span lang="EN-CA" style="font-family:"Arial",sans-serif">Important Notice</span></strong><span lang="EN-CA" style="font-family:"Arial",sans-serif"><o:p></o:p></span></p>
<p><span lang="EN-CA" style="font-family:"Arial",sans-serif;color:gray">The information contained in this email is confidential. If you are not the intended recipient,you must not disclose or use the information in this email in any way.If you received it in
error, please tell us immediately by return email and delete this message.SDI-Fabsurplus, LLC does not guarantee the integrity of any emails or attached files. It is also not responsible for any changes made to them by any other person.<br>
Fraud Alert - The strategically important semiconductor equipment sector is currently under attack by fraudsters.Many false and mis-spelled versions of common websites are being registered for use in"Business E-mail Compromise" schemes. False companies have
been set up in all parts of the world, including the USA, to do wire fraud. Avoid e-mail fraud by defining an I.T. security policy and carefully monitoring any bank transfers for false information.Check any e-mails sent to you are legitimate by looking at
the e-mail headers, and scan any attachments for viruses before opening them.<o:p></o:p></span></p>
</div>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">On Thu, 2020-05-28 at 13:48 +0000, Robert Vandusen wrote:<o:p></o:p></span></p>
</div>
<blockquote style="border:none;border-left:solid #729FCF 1.5pt;padding:0in 0in 0in 6.0pt;margin-left:4.8pt;margin-right:0in">
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Hi Aaron.<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Back in 2015 we had similar concerns with our Balzers BA 510 thermal/ebeam evaporator. We had reintroduced thermal capability to our system and had modified
our internal SS shielding to allow us to have a direct line of sight to the thermal melt through a glass slide mounted on the shield and through one of the window viewports. Prior to this we only used ebeam evaporation and the shielding blocked the viewport.
As you have found, I was unable to find any literature on x-ray exposure concerns outside the chamber area.
<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">I contacted our Health and Safety department who helped conduct x-ray testing during ebeam evaporations of a few different materials. They found no measurable
x-rays coming through the viewport or elsewhere on the chamber. This satisfied our safety concerns. However since the system was now identified as an potential x-ray producing source we had to get an Ontario ministry of labor x-ray permit and post it at
the room doors and on the system. It basically requires us to get a new assessment if we make any changes or modifications to the system that could result in increased exposure.<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">So we have piece of mind, but now a lot more questions when users see the x-ray signage. <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Hope this helps.<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Rob<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:9.0pt;font-family:"Helvetica",sans-serif"> </span><span lang="EN-CA" style="font-size:10.0pt;font-family:"Helvetica",sans-serif"> Robert Vandusen<br>
Microfabrication Cleanlab Facility Manager<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
613-520-2600 ext 5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca" target="_blank"><span style="color:purple">Robert_vandusen@cunet.carleton.ca</span></a></span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b>From:</b>
<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Aaron Hryciw<br>
<b>Sent:</b> May 27, 2020 11:21 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Hazard due to x-ray production in e-beam evaporators?<span lang="EN-CA"><o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<table class="MsoNormalTable" border="0" cellpadding="0" width="100%" style="width:100.0%;background:#FFFFE6">
<tbody>
<tr>
<td style="padding:2.0pt 2.0pt 2.0pt 2.0pt">
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:11.0pt">
<span style="font-size:10.0pt;color:black">[External Email]</span><o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<div>
<div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Dear colleagues,<br>
<br>
One of the users in our open-access facility recently expressed concern about x-ray production in electron-beam evaporation systems. Since the typical acceleration voltage in our e-beam systems is 7–10 kV, he was concerned that bremsstrahlung and characteristic
x-rays would be generated during deposition, with a maximum energy of 7–10 keV (soft to hard x-rays), and that these x-rays would pose a health and safety hazard to an operator standing next to the viewport for ~30 minutes.<br>
<br>
A literature search yielded a few reports describing radiation damage to sensitive devices from x-rays produced during an e-beam metallization step, but I did not find any mention of related health and safety considerations. While some x-rays are undoubtedly
produced, presumably there are reasons why they are not hazardous to an operator (e.g., perhaps total x-ray output is very small, majority of x-ray spectrum is low energy, x-rays do not penetrate stainless steel chamber walls or viewport windows, etc.). I
would like to answer this user with specific physical arguments as to why the hazard is insignificant, however, so any advice you could offer to this end would be greatly appreciated. Many thanks.<br>
<br>
Cheers, <br>
<br>
– Aaron<o:p></o:p></span></p>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"><br clear="all">
<o:p></o:p></span></p>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><u><span lang="EN-CA" style="font-size:10.0pt"> </span></u><span lang="EN-CA" style="font-size:10.0pt"> </span><span lang="EN-CA"><o:p></o:p></span></p>
</div>
<div>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Aaron Hryciw, PhD, PEng</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Fabrication Group Manager</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">University of Alberta - nanoFAB</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">W1-060 ECERF Building</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">9107 - 116 Street</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Edmonton, Alberta</span><span lang="EN-CA"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black">Canada T6G 2V4 Ph: 780-940-7938</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:12.0pt"><span lang="EN-CA" style="font-size:7.5pt;font-family:"Arial",sans-serif;color:black"><a href="https://urldefense.com/v3/__http:/www.nanofab.ualberta.ca/__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtcdvZb9pI$" target="_blank"><span style="color:#1155CC">www.nanofab.ualberta.ca</span></a>
</span><span lang="EN-CA"><o:p></o:p></span></p>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
<table class="MsoNormalTable" border="1" cellpadding="0" width="100%" style="width:100.0%;background:#FFFFE6;border:none;border-left:solid red 6.0pt" id="gmail-m_3080886676539256879tableStyle">
<tbody>
<tr>
<td style="border:none;padding:2.0pt 2.0pt 2.0pt 2.0pt">
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:11.0pt">
<span style="font-size:10.0pt;color:black">This email contains links to content or websites. Always be cautious when clicking on external links or attachments. If in doubt, please forward suspicious emails to
<a href="mailto:phishing@carleton.ca" target="_blank">phishing@carleton.ca</a>.</span><o:p></o:p></p>
</td>
</tr>
</tbody>
</table>
<div id="gmail-m_3080886676539256879div2">
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:1.0pt;color:white">-----End of Disclaimer-----</span><span lang="EN-CA"><o:p></o:p></span></p>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">
<o:p></o:p></span></p>
</div>
<pre><span lang="EN-CA">_______________________________________________<o:p></o:p></span></pre>
<pre><span lang="EN-CA">labnetwork mailing list<o:p></o:p></span></pre>
<pre><span lang="EN-CA"><a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><o:p></o:p></span></pre>
<pre><span lang="EN-CA"><a href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!KGKeukY!jfxwL2i3FZfOuYFuV-35aRT9WDNc7YWi91ZRyKCZ92beRguaEHni9h2xwVtchEO6rMI$" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></span></pre>
<pre><span lang="EN-CA"><o:p> </o:p></span></pre>
</blockquote>
</blockquote>
</div>
</div>
</body>
</html>