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Hi there! Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.</div>
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<p style="margin-top: 0px; margin-bottom: 0px;">Cheers!</p>
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<p style="margin-top: 0px; margin-bottom: 0px;">Julia Aebersold, Ph.D.</p>
<p style="margin-top: 0px; margin-bottom: 0px;">Manager, Micro/Nano Technology Center</p>
<p style="margin-top: 0px; margin-bottom: 0px;">University of Louisville</p>
<p style="margin-top: 0px; margin-bottom: 0px;">2210 South Brook Street</p>
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<p style="margin-top: 0px; margin-bottom: 0px;">Louisville, KY 40292</p>
<p style="margin-top: 0px; margin-bottom: 0px;">(502) 852-1572</p>
<p style="margin-top: 0px; margin-bottom: 0px;"><a tabindex="0" href="http://louisville.edu/micronano">http://louisville.edu/micronano/</a></p>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> Football <yaofootball@gmail.com><br>
<b>Sent:</b> Monday, June 8, 2020 5:03 PM<br>
<b>To:</b> Aebersold,Julia W. <julia.aebersold@louisville.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Sputtering of MgF2</font>
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<div class="x_gmail_default" style="font-size:small">I have the same question. I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system). Does it cause hard-to-clean contaminations to the chamber, like
small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and s<span class="x_gmail_default">tay healthy.</span><br>
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<div dir="ltr"><span class="x_gmail_default" style="font-size:small"></span><span style="color:rgb(31,73,125); font-family:Calibri,sans-serif; font-size:11pt">Fubo Rao, Ph.D. </span></div>
<p class="x_MsoNormal" style="margin:0in 0in 0.0001pt; font-size:11pt; font-family:Calibri,sans-serif">
<span style="color:rgb(31,73,125)">Materials Research Laboratory</span></p>
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<span style="color:rgb(31,73,125)">The Grainger College of Engineering<br>
University of Illinois at Urbana-Champaign<br>
104 S. Goodwin Ave. Urbana, IL 61801<br>
Office: 217-244-6202<br>
Email: <a href="mailto:frao@illinois.edu%0b" target="_blank"><span style="color:blue">frao@illinois.edu<br>
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<div dir="ltr" class="x_gmail_attr">On Thu, Jun 8, 2017 at 2:51 PM <<a href="mailto:julia.aebersold@louisville.edu" target="_blank">julia.aebersold@louisville.edu</a>> wrote:<br>
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<div id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047divtagdefaultwrapper" dir="ltr" style="font-size:12pt; color:rgb(0,0,0); font-family:Calibri,Arial,Helvetica,sans-serif">
<p>I have a client that wants to sputter MgF2 in our processing chamber. We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.</p>
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<p>Cheers!</p>
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<p>Julia Aebersold, Ph.D.</p>
<p>MNTC Cleanroom Manager</p>
<p>University of Louisville</p>
<p>2210 South Brook Street</p>
<p>Shumaker Research Building, Room 233</p>
<p>Louisville, KY 40292</p>
<p>(502) 852-1572</p>
<p><a href="http://louisville.edu/micronano" id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047LPNoLP" target="_blank">http://louisville.edu/micronano/</a></p>
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