<html><head><meta http-equiv="Content-Type" content="text/html; charset=utf-8"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class="">We also had a user depositing MgF2 routinely in our e-beam evaporator. Before letting them use this material, we completed a safety/process review together and confirmed that we didn’t anticipate any problems.<div class=""><br class=""></div><div class="">It did not subsequently create any special issues for us on our general purpose tool, which routinely supports dielectric and magnetic materials.</div><div class=""><br class=""></div><div class="">No idea about sputtering it; you may also want to consult your tool vendor in case they have a process expert who can help you.</div><div class=""><br class=""></div><div class="">Best of luck,<br class=""><div class="">
<div dir="auto" style="caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; word-wrap: break-word; -webkit-nbsp-mode: space; line-break: after-white-space;" class=""><br class="">-- <br class="">Tim Gilheart, Ph.D.<br class="">Research Scientist - Nanofabrication Cleanroom Manager,<br class="">Shared Equipment Authority (SEA), Rice University<br class="">Cell: 832-341-5488 | Office: 713-348-3159 | <a href="mailto:gilheart@rice.edu" class="">gilheart@rice.edu</a><br class=""></div>
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<div><br class=""><blockquote type="cite" class=""><div class="">On Jun 8, 2020, at 4:55 PM, Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu" class="">julia.aebersold@louisville.edu</a>> wrote:</div><br class="Apple-interchange-newline"><div class=""><div style="caret-color: rgb(0, 0, 0); font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class="">Hi there! Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.</div><div style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><div style="font-family: Calibri, Arial, Helvetica, sans-serif; font-size: 12pt;" class=""><br class=""></div><div id="Signature" class=""><div class=""><div id="divtagdefaultwrapper" dir="ltr" style="font-size: 12pt; font-family: Calibri, Helvetica, sans-serif;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div class=""><div class=""><div class=""><div style="margin-top: 0px; margin-bottom: 0px;" class="">Cheers!</div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><br class=""></div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Julia Aebersold, Ph.D.</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Manager, Micro/Nano Technology Center</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">University of Louisville</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">2210 South Brook Street</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Shumaker Research Building, Room 233</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Louisville, KY 40292</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">(502) 852-1572</div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><a tabindex="0" href="http://louisville.edu/micronano" class="">http://louisville.edu/micronano/</a></div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><br class=""></div></div></div></div></div></div></div></div></div></div></div></div><div id="appendonsend" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""></div><hr tabindex="-1" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; display: inline-block; width: 705.59375px;" class=""><span style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none; float: none; display: inline !important;" class=""></span><div id="divRplyFwdMsg" dir="ltr" style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><font face="Calibri, sans-serif" style="font-size: 11pt;" class=""><b class="">From:</b><span class="Apple-converted-space"> </span>Football <<a href="mailto:yaofootball@gmail.com" class="">yaofootball@gmail.com</a>><br class=""><b class="">Sent:</b><span class="Apple-converted-space"> </span>Monday, June 8, 2020 5:03 PM<br class=""><b class="">To:</b><span class="Apple-converted-space"> </span>Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu" class="">julia.aebersold@louisville.edu</a>><br class=""><b class="">Cc:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a><span class="Apple-converted-space"> </span><<a href="mailto:labnetwork@mtl.mit.edu" class="">labnetwork@mtl.mit.edu</a>><br class=""><b class="">Subject:</b><span class="Apple-converted-space"> </span>Re: [labnetwork] Sputtering of MgF2</font><div class=""> </div></div><div style="caret-color: rgb(0, 0, 0); font-family: Helvetica; font-size: 14px; font-style: normal; font-variant-caps: normal; font-weight: normal; letter-spacing: normal; text-align: start; text-indent: 0px; text-transform: none; white-space: normal; word-spacing: 0px; -webkit-text-stroke-width: 0px; text-decoration: none;" class=""><div style="margin-top: 0px; margin-bottom: 0px; line-height: 12pt; background-color: rgb(255, 77, 77);" class=""><b class=""><span style="font-size: 10pt;" class="">CAUTION:</span></b><span style="font-size: 10pt;" class=""><span class="Apple-converted-space"> </span>This email originated from outside of our organization. Do not click links, open attachments, or respond unless you recognize the sender's email address and know the contents are safe.</span></div><div class=""></div><div class=""><div dir="ltr" class=""><div dir="ltr" class=""><div dir="ltr" class=""><div dir="ltr" class=""><div dir="ltr" class=""><div class="x_gmail_default" style="font-size: small;">I have the same question. I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system). Does it cause hard-to-clean contaminations to the chamber, like small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and s<span class="x_gmail_default">tay healthy.</span><br class=""></div><div class="x_gmail_default" style="font-size: small;"><span class="x_gmail_default"><br class=""></span></div><div class=""><div dir="ltr" class=""><div dir="ltr" class=""><div class=""><br class=""></div><div dir="ltr" class=""><span class="x_gmail_default" style="font-size: small;"></span><span style="color: rgb(31, 73, 125); font-family: Calibri, sans-serif; font-size: 11pt;" class="">Fubo Rao, Ph.D. </span></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span style="color: rgb(31, 73, 125);" class="">Materials Research Laboratory</span></div><div style="margin: 0in 0in 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span style="color: rgb(31, 73, 125);" class="">The Grainger College of Engineering<br class="">University of Illinois at Urbana-Champaign<br class="">104 S. Goodwin Ave. Urbana, IL 61801<br class="">Office: 217-244-6202<br class="">Email:<span class="Apple-converted-space"> </span><a href="mailto:frao@illinois.edu%0b" target="_blank" class=""><span style="color: blue;" class="">frao@illinois.edu<br class=""></span></a></span></div></div></div></div><br class=""></div><br class=""><div class="x_gmail_quote"><div dir="ltr" class="x_gmail_attr">On Thu, Jun 8, 2017 at 2:51 PM <<a href="mailto:julia.aebersold@louisville.edu" target="_blank" class="">julia.aebersold@louisville.edu</a>> wrote:<br class=""></div><blockquote class="x_gmail_quote" style="margin: 0px 0px 0px 0.8ex; border-left-width: 1px; border-left-style: solid; border-left-color: rgb(204, 204, 204); padding-left: 1ex;"><div dir="ltr" class=""><div id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047divtagdefaultwrapper" dir="ltr" style="font-size: 12pt; font-family: Calibri, Arial, Helvetica, sans-serif;" class=""><div style="margin-top: 0px; margin-bottom: 0px;" class="">I have a client that wants to sputter MgF2 in our processing chamber. We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.</div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><br class=""></div><div id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047Signature" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div style="font-family: Tahoma; font-size: 13px;" class=""><div class=""><div class=""><div class=""><div style="margin-top: 0px; margin-bottom: 0px;" class="">Cheers!</div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><br class=""></div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Julia Aebersold, Ph.D.</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">MNTC Cleanroom Manager</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">University of Louisville</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">2210 South Brook Street</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Shumaker Research Building, Room 233</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">Louisville, KY 40292</div><div style="margin-top: 0px; margin-bottom: 0px;" class="">(502) 852-1572</div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><a href="http://louisville.edu/micronano" id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047LPNoLP" target="_blank" class="">http://louisville.edu/micronano/</a></div><div style="margin-top: 0px; margin-bottom: 0px;" class=""><br class=""></div></div></div></div></div></div></div></div></div></div></div>_______________________________________________<br class="">labnetwork mailing list<br class=""><a href="mailto:labnetwork@mtl.mit.edu" target="_blank" class="">labnetwork@mtl.mit.edu</a><br class=""><a href="https://nam03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww-mtl.mit.edu%2Fmailman%2Flistinfo.cgi%2Flabnetwork&data=02%7C01%7Cjulia.aebersold%40louisville.edu%7C522e71eb7ffb443a206a08d80bef756e%7Cdd246e4a54344e158ae391ad9797b209%7C0%7C0%7C637272470378234235&sdata=8xJgIWd7XXov597vZvvym8dm5PUZOOtCpKIVh0CSVpI%3D&reserved=0" originalsrc="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork" shash="krsHaOKpRWYJ1p0lAXWvwnkuMDE75o+N0XI/fKwpHsVsLzRgI5eX46K5jzmFdKR4JejkOIHrA7p9+aAAb4GscjiFA3ltpTVpg6gpLVboKPq/zArgEmR/kngz+l+Ui/bjX0pqyXbggJxFpWhhq8EtQC9G8f+kHHt7nXO9JPbaplY=" rel="noreferrer" target="_blank" class="">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br class=""></blockquote></div></div></div></div></div></div></div><span style="caret-color: rgb(0, 0, 0); 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