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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I usually ask these questions to our target vendor if our team lacks the knowledge about a particular material. Kurt Lesker, who we buy many of our targets through,
has applications engineers that are quite knowledgeable about the majority of materials and compound materials. I am not knocking the other vendors, as I am sure they are knowledgeable as well.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">John C Nash<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">SMFL - Technician<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Semiconductor & Microsystems Fabrication Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">82 Lomb Memorial Dr.
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">585 478-3835 cell<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="mailto:john.nash@rit.edu">john.nash@rit.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><a href="http://www.smfl.rit.edu">www.smfl.rit.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Tim Gilheart<br>
<b>Sent:</b> Thursday, June 11, 2020 3:13 PM<br>
<b>To:</b> Aebersold,Julia W. <julia.aebersold@louisville.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Sputtering of MgF2<o:p></o:p></span></p>
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<p class="MsoNormal">We also had a user depositing MgF2 routinely in our e-beam evaporator. Before letting them use this material, we completed a safety/process review together and confirmed that we didn’t anticipate any problems.<o:p></o:p></p>
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<p class="MsoNormal">It did not subsequently create any special issues for us on our general purpose tool, which routinely supports dielectric and magnetic materials.<o:p></o:p></p>
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<p class="MsoNormal">No idea about sputtering it; you may also want to consult your tool vendor in case they have a process expert who can help you.<o:p></o:p></p>
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<p class="MsoNormal">Best of luck,<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black"><br>
-- <br>
Tim Gilheart, Ph.D.<br>
Research Scientist - Nanofabrication Cleanroom Manager,<br>
Shared Equipment Authority (SEA), Rice University<br>
Cell: 832-341-5488 | Office: 713-348-3159 | <a href="mailto:gilheart@rice.edu">gilheart@rice.edu</a><o:p></o:p></span></p>
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<p class="MsoNormal">On Jun 8, 2020, at 4:55 PM, Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">Hi there! Its been so long ago that I don't recall the details, but we have not had any issues with our e-beam system since then.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Cheers!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Manager, Micro/Nano Technology Center<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">University of Louisville<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Football
<<a href="mailto:yaofootball@gmail.com">yaofootball@gmail.com</a>><br>
<b>Sent:</b><span class="apple-converted-space"> </span>Monday, June 8, 2020 5:03 PM<br>
<b>To:</b><span class="apple-converted-space"> </span>Aebersold,Julia W. <<a href="mailto:julia.aebersold@louisville.edu">julia.aebersold@louisville.edu</a>><br>
<b>Cc:</b><span class="apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><span class="apple-converted-space"> </span><<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b><span class="apple-converted-space"> </span>Re: [labnetwork] Sputtering of MgF2</span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica",sans-serif">I have the same question. I don't know if there are compatibility problems with other elements (mostly are metals in our sputter system). Does it cause hard-to-clean contaminations to the
chamber, like small flakes, or problems to the vacuum quality of the chamber? Does it have special handling requirements? Any advice is greatly appreciated. Thanks and s<span class="xgmaildefault">tay healthy.</span><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Fubo Rao, Ph.D. </span><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Materials Research Laboratory</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The Grainger College of Engineering<br>
University of Illinois at Urbana-Champaign<br>
104 S. Goodwin Ave. Urbana, IL 61801<br>
Office: 217-244-6202<br>
Email:<span class="apple-converted-space"> </span><a href="mailto:frao@illinois.edu%0b" target="_blank">frao@illinois.edu<br>
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<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Helvetica",sans-serif">On Thu, Jun 8, 2017 at 2:51 PM <<a href="mailto:julia.aebersold@louisville.edu" target="_blank">julia.aebersold@louisville.edu</a>> wrote:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Calibri",sans-serif">I have a client that wants to sputter MgF2 in our processing chamber. We do not have any experience with this material and wanted to ask folks if there were outgasing or contamination concerns.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Cheers!<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">Julia Aebersold, Ph.D.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">University of Louisville<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">2210 South Brook Street<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif">(502) 852-1572<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma",sans-serif"><a href="http://louisville.edu/micronano" target="_blank" id="x_gmail-m_-4247909170743507294gmail-m_-7709687541889379047LPNoLP">http://louisville.edu/micronano/</a><o:p></o:p></span></p>
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