<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=us-ascii"><meta name=Generator content="Microsoft Word 15 (filtered medium)"><!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72"><div class=WordSection1><p class=MsoNormal>Is the area of installation concave or convex? If all the issues are concavities then a suitable self-levelling compound (concrete, polymer or epoxy) could be very simple solution. If you have convex areas you have two choices: grind them down (likely not the best idea given the setting, yet it is possible when done by someone with the appropriate experience, tools and training) or use self levelling compounds to create a new flat plane above the highest convex peak (i.e.: a 1 inch thick pad on top of the existing floor). I’ve used this last approach many times for a range of machine tools.<br><br>Depending on machine configuration, it could be as simple as using standard wedge-type machine levelling pads:<br><br><o:p></o:p></p><p class=MsoNormal><a href="https://www.mcmaster.com/6015K41">https://www.mcmaster.com/6015K41</a><br><br><o:p></o:p></p><p class=MsoNormal>Here’s a ESD conductive self levelling epoxy product. You might want to ping them for an opinion. It would likely be a good idea to have a “depth map” of the area to be treated before reaching out.<br><br><a href="https://www.stonhard.com/products/stonlux/">https://www.stonhard.com/products/stonlux/</a><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><div><p class=MsoNormal> -Martin<o:p></o:p></p></div><p class=MsoNormal><o:p> </o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Shivakumar Bhaskaran<br><b>Sent:</b> Friday, June 12, 2020 2:22 PM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Floor Flat for EBeam Litho Tool<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Hello All,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I hope everyone is safe and healthy.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Our Equipment engineer measured the floor flatness for the EBeam Lithography tool, and we found that the floor is not flat as per the tool spec. We are not sure whether the vinyl flooring was the issue or the concrete floor underneath. Below the tile, we have a static grid installed, cutting the floor tile might risk the portion of the floor that will not be grounded, so we are thinking of using sleeper plate to level the equipment.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Have anyone installed the EBeam Lithography tool on the Sleeper plate. Please, let me know if you have any suggestions on how to level the equipment.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>The tool we are installing is EBPG5150; the equipment requirement for floor tolerance is 1.5mm within the entire footprint of the EBPG system plinth.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thanks,<o:p></o:p></p><p class=MsoNormal>Shiva<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><b><span style='font-size:9.0pt'>Shivakumar Bhaskaran, Ph.D., <o:p></o:p></span></b></p><p class=MsoNormal><span style='font-size:9.0pt;color:black'>Associate Director, <o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:black'>John D. O’Brien Nanofabrication Laboratory<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:black'>Michelson Hall, 1002 Childs Way, MCB LL121,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:black'>Los Angeles, California 90089, 213 821 2374<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:9.0pt;color:#7F7F7F'><img border=0 width=130 height=43 style='width:1.3541in;height:.4479in' id="Picture_x0020_1" src="cid:image001.jpg@01D64170.BF0C1130" alt=Sign></span><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>