<div dir="ltr">Chang,<div><br></div><div>Not sure about the effects on your process. I may recommend cleaning with a scotch-brite + PTFE specific solvent before running an O2 clean.</div><div><br></div><div>Best,</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Jul 17, 2020 at 4:43 PM Chang, Long <<a href="mailto:lvchang@central.uh.edu">lvchang@central.uh.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">



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Hi All,
<div><br>
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<div>The lower electrode to our RIE system has taken quite a bit of abuse over the decade, see photo. There are scratches and pits caused by wafer shards. There’s also a film of something (probably PTFE oil) in the middle.</div>
<div><br>
</div>
<div>Does anyone know how these scratches and pits might affect the Bosch Process? Any recommendations for cleaning this up?</div>
<div><br>
</div>
<div>Thanks,<br>
<div>
<div dir="auto" style="color:rgb(0,0,0);letter-spacing:normal;text-align:start;text-indent:0px;text-transform:none;white-space:normal;word-spacing:0px;text-decoration:none">
Long</div>
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<img id="gmail-m_-2355012147139466950533768D0-6081-49C3-B6B7-86CF797B26EE" src="cid:1736ce9149a83d6d881"></div>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr">Ahdam Ali<div style="text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;font-family:Arial,Helvetica,sans-serif;font-size:13px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><font face="arial,sans-serif">R&D Engineer</font></div><div style="text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;font-family:Arial,Helvetica,sans-serif;font-size:13px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><font face="arial,sans-serif">UCSD Calit2 Nano3 Facility</font></div><div style="text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;font-family:Arial,Helvetica,sans-serif;font-size:13px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><font face="arial,sans-serif">Atkinson Hall <span style="color:rgb(0,0,0);font-size:13.33px">M/C0436</span></font></div><div style="text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;font-family:Arial,Helvetica,sans-serif;font-size:13px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><span style="color:rgb(0,0,0);font-size:13.33px"><font face="arial,sans-serif">9500 Gilman Drive</font></span></div><div style="text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;font-family:Arial,Helvetica,sans-serif;font-size:13px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><span style="color:rgb(0,0,0);font-size:13.33px"><font face="arial,sans-serif">La Jolla, CA  92093-0436</font></span></div><div style="font:400 13.33px/19.99px Arial,Helvetica,sans-serif;text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;overflow:visible;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><font style="font:400 13.33px/19.99px georgia,serif;overflow:visible"><font face="arial,sans-serif"></font><br style="font:400 13.33px/19.99px georgia,serif;overflow:visible"></font></div><div style="text-align:left;color:rgb(34,34,34);text-transform:none;line-height:19.99px;text-indent:0px;letter-spacing:normal;overflow:visible;font-size:13.33px;font-style:normal;font-variant:normal;font-weight:400;text-decoration:none;word-spacing:0px;white-space:normal;font-stretch:100%;background-color:transparent"><font face="arial,sans-serif">E<font style="font:400 13.33px/19.99px georgia,serif;overflow:visible">mail: <a style="color:rgb(17,85,204)" href="mailto:pdriscoll@eng.ucsd.edu" target="_blank">aali@eng.ucsd.edu</a></font></font></div><div style="font:400 13.33px/19.99px Arial,Helvetica,sans-serif;text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;overflow:visible;text-decoration:none;word-spacing:0px;white-space:normal;background-color:transparent"><font face="arial,sans-serif"></font>Phone: (<span style="font:400 13.33px/19.99px Arial,Helvetica,sans-serif;text-align:left;color:rgb(34,34,34);text-transform:none;text-indent:0px;letter-spacing:normal;text-decoration:none;word-spacing:0px;display:inline;white-space:normal;direction:ltr;float:none;background-color:rgb(255,255,255)">858)-534-4768</span></div></div></div></div></div></div></div>