<div dir="ltr"><div class="gmail_default" style="font-size:small">Hi Jerry,</div><div class="gmail_default" style="font-size:small"><br></div><div class="gmail_default" style="font-size:small">UIUC Material Research Laboratory has ALDs that can deposit what you need. Please refer to the website for more details. UIUC is at Champaign Urbana which is not far away from you.</div><div class="gmail_default" style="font-size:small"> <a href="https://mrl.illinois.edu/facilities/equipment/savannah-s100-atomic-layer-deposition-cambridge-nanotech">https://mrl.illinois.edu/facilities/equipment/savannah-s100-atomic-layer-deposition-cambridge-nanotech</a></div><div class="gmail_default" style="font-size:small"><br></div><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div>Regards,</div><div dir="ltr"><span class="gmail_default" style="font-size:small"></span><span class="gmail_default"></span><span class="gmail_default" style="font-size:small"></span><span style="color:rgb(31,73,125);font-family:Calibri,sans-serif;font-size:11pt">Fubo Rao,
Ph.D. </span><p class="MsoNormal" style="margin:0in 0in 0.0001pt;font-size:11pt;font-family:Calibri,sans-serif"><span style="color:rgb(31,73,125)">
Materials Research Laboratory</span></p>

<p class="MsoNormal" style="margin:0in 0in 0.0001pt;font-size:11pt;font-family:Calibri,sans-serif"><span style="color:rgb(31,73,125)">The
Grainger College of Engineering<br>
University of Illinois at Urbana-Champaign<br>
104 S. Goodwin Ave. Urbana, IL 61801<br>
Office: 217-244-6202<br>
Email: <a href="mailto:frao@illinois.edu%0b"><span style="color:blue">frao@illinois.edu<br>
</span></a></span></p> </div><div dir="ltr"><span class="gmail_default" style="font-size:small"></span> </div></div></div></div></div><br></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Mon, Aug 10, 2020 at 11:05 AM Shepard, Jeremiah J <<a href="mailto:jshepar@purdue.edu">jshepar@purdue.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">




<div dir="ltr">
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<span>All,</span></div>
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<span>Good morning!  I am an engineer with Purdue's Birck Nanotechnology fab.  Our ALD system has went down and will be down for several weeks.  I am looking for alternatives for our researchers to use until our system comes back online.  We are located in
 West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail.  </span></div>
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<span><br>
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<div style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">
<span>Our system is equipped with AlOx, HfOx,  and SiOx.  The majority of our users are growing AlOx and HfOx.  We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.  We also have many users growing at
 more traditional 200 C temps.  I would expect work coming from our fab to fall within these parameters.</span></div>
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<div style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">
<span>Any leads would be greatly appreciated!</span></div>
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<div style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">
<span>Thank you,</span></div>
<div style="color:rgb(0,0,0);font-family:Calibri,Arial,Helvetica,sans-serif;font-size:12pt">
<span>Jerry Shepard</span></div>
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<span><br>
</span></div>
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</blockquote></div>