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Hi Adam,</div>
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Do you mean conformal, or planarizing? I would expect most resists/liquids to cover the surface in a level film (i.e. planarizing), with the tips extending out of the resist layer, perhaps getting
<i>some </i>coating. Or do you want a truly conformal coating, like you would expect from ALD deposition?</div>
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What is your ultimate goal, and your next step in the process?</div>
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Mac<br>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> on behalf of Adam Legacy <dradamlegacy@gmail.com><br>
<b>Sent:</b> Tuesday, August 18, 2020 5:11 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> [labnetwork] Conformal electron beam resist coating over 3D structures</font>
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<div dir="ltr">Hi,
<div>We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2.</div>
<div>Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service
for this application. What will be suitable for this?</div>
<div>Please advise.</div>
<div>Best regards,</div>
<div>Adam.</div>
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