<div dir="ltr">Dear Adam,<div><br></div><div>I don't have a direct answer to your question, but I have a lead. You should try contacting the authors of this paper:<br><a href="https://science.sciencemag.org/content/349/6254/1310.abstract">https://science.sciencemag.org/content/349/6254/1310.abstract</a><br></div><div><br></div><div>They do a lot of great fab, but in this paper in particular they are able to nanopattern gold nanostructures on a very "hilly" substrate. Probably they needed to have a conformal resist on their structure before getting started. </div><div><br></div><div>I remember meeting one of them at a conference and they said it was extremely extremely challenging, so likely they have 1 or 2 experiences that might benefit your process.</div><div><br>Orad</div><div><br clear="all"><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr">Orad Reshef, PhD</div><div dir="ltr"><br>Département de physique | Department of Physics<br>Université d’Ottawa | University of Ottawa<br><a href="http://boydnlo.ca" target="_blank">boydnlo.ca</a> | <a href="http://reshef.ca" target="_blank">reshef.ca</a><br></div></div></div></div></div><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Aug 19, 2020 at 11:47 AM Hathaway, Malcolm R <<a href="mailto:hathaway@cns.fas.harvard.edu">hathaway@cns.fas.harvard.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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Hi Adam,</div>
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Do you mean conformal, or planarizing? I would expect most resists/liquids to cover the surface in a level film (i.e. planarizing), with the tips extending out of the resist layer, perhaps getting
<i>some </i>coating. Or do you want a truly conformal coating, like you would expect from ALD deposition?</div>
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What is your ultimate goal, and your next step in the process?</div>
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Mac<br>
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<div id="gmail-m_7620115095420830652divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" style="font-size:11pt" color="#000000"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>> on behalf of Adam Legacy <<a href="mailto:dradamlegacy@gmail.com" target="_blank">dradamlegacy@gmail.com</a>><br>
<b>Sent:</b> Tuesday, August 18, 2020 5:11 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a> <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br>
<b>Subject:</b> [labnetwork] Conformal electron beam resist coating over 3D structures</font>
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<div dir="ltr">Hi,
<div>We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2.</div>
<div>Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service
for this application. What will be suitable for this?</div>
<div>Please advise.</div>
<div>Best regards,</div>
<div>Adam.</div>
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<div><img alt="getImage.jpg" width="500" height="404" src="cid:174077bb2e1cb047a181"><br>
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</blockquote></div>