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<p class="MsoNormal"><span style="color:#1F497D">Hi Nava: I’ll echo Rick’s maintenance experience for ours at Stanford. We did a conversion a number of years back and on top of what Rick mentions, our MFC has had trouble stabilizing and suffers clogs every
so often. The whole line plus MFC need to be heated. We have a plasma trap at the tube outlet to try and react out some of the TEOS before it gets to the pump. It’s effective, but that in itself needs to be cleaned out periodically, and it’s messy.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We haven’t gotten smart enough to buy our own TEOS ampoules, so we’re paying a hefty rental fee for the one in service plus one spare. If you buy your own, you’ll need to arrange fills with your friendly supplier
and make sure that the heater was made for it. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Happy Friday,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Carsen<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Carsen Kline <br>
Lab Operations Manager <br>
Stanford Nanofabrication Facility <br>
(650)724-8214 <br>
<a href="http://snf.stanford.edu/"><span style="color:blue">http://snf.stanford.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Morrison, Richard H., Jr<br>
<b>Sent:</b> Friday, August 28, 2020 12:03 PM<br>
<b>To:</b> Nava Ariel-Sternberg <na2661@columbia.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Adding TEOS to LPCVD furnace<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure you have a trap on the pump line before you hit the pumps, needs to be cleaned often and it is a sickly sweet smell, like ethanol. Make
sure you use a tube liner to protect the tube. Lots of flakes on the vacuum side and pay attention to the tube output it likes to clog there. We used a roots blower and every year it needed to be rebuilt due to TEOS deposition.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">One the updide TEOS is a great material, we used to densify it with a long anneal at say 1000c.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hopes this helps<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge, MA<o:p></o:p></p>
<p class="MsoNormal">02139-3573<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Work 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">Cell 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Friday, August 28, 2020 11:04 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Adding TEOS to LPCVD furnace<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Happy Friday everyone, <o:p></o:p></p>
<p class="MsoNormal">I hope you and your families are doing well in these weird times.
<o:p></o:p></p>
<p class="MsoNormal">We were asked to look into adding a TEOS capability to our LPCVD furnace.
<o:p></o:p></p>
<p class="MsoNormal">Has any of you done it? Could you advise on the main steps and things to look out for?
<o:p></o:p></p>
<p class="MsoNormal">Thanks and stay healthy (and happy as much as possible),<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Labs<o:p></o:p></p>
<p class="MsoNormal">Columbia University<o:p></o:p></p>
<p class="MsoNormal">CEPSR/MC 8903 <o:p></o:p></p>
<p class="MsoNormal">530 west 120<sup>th</sup> st. NY<o:p></o:p></p>
<p class="MsoNormal">NY 10027<o:p></o:p></p>
<p class="MsoNormal">Office: 212-8549927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-5627600<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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