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<p class="MsoNormal"><span style="color:#1F497D">When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure you have a trap on the pump line before you hit the pumps, needs to be cleaned often and it is a sickly sweet smell, like ethanol. Make
sure you use a tube liner to protect the tube. Lots of flakes on the vacuum side and pay attention to the tube output it likes to clog there. We used a roots blower and every year it needed to be rebuilt due to TEOS deposition.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">One the updide TEOS is a great material, we used to densify it with a long anneal at say 1000c.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hopes this helps<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
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<p class="MsoNormal">Work 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">Cell 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com"><span style="color:#0563C1">www.draper.com</span></a><o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Friday, August 28, 2020 11:04 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Adding TEOS to LPCVD furnace<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Happy Friday everyone, <o:p></o:p></p>
<p class="MsoNormal">I hope you and your families are doing well in these weird times.
<o:p></o:p></p>
<p class="MsoNormal">We were asked to look into adding a TEOS capability to our LPCVD furnace.
<o:p></o:p></p>
<p class="MsoNormal">Has any of you done it? Could you advise on the main steps and things to look out for?
<o:p></o:p></p>
<p class="MsoNormal">Thanks and stay healthy (and happy as much as possible),<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Labs<o:p></o:p></p>
<p class="MsoNormal">Columbia University<o:p></o:p></p>
<p class="MsoNormal">CEPSR/MC 8903 <o:p></o:p></p>
<p class="MsoNormal">530 west 120<sup>th</sup> st. NY<o:p></o:p></p>
<p class="MsoNormal">NY 10027<o:p></o:p></p>
<p class="MsoNormal">Office: 212-8549927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-5627600<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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