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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">HI Wing Leong,
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">Nice to meet you via Labnetwork. Very exciting to build a new research facility at HKUST. I know Greg Raupp very well who used to work there between stints at ASU.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">Use of a subfab can make the construction and eventual tool hookup much more expensive than a slab on grade or partial subfab type facility (which is also an option) . A full subfab
set up on a Waffle Slab with raised access flooring, is not usually necessary for tools to support substrate sizes up to 6 inches or even 8 inches, whether wafers or other substrates. However, many modern production type tools for 200 mm and 300 mm are set
up to facilitize the tools from below, using a subfab and raised access floor configuration. These larger substrate tools have a tool footprint in the subfab of a size similar to the fab level footprint configuration. So those will be most cost effective
if facilitized with a subfab (a lower cost zone for the support equipment and utility distribution).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">Decisions on fab level height, use of Raised Access Flooring or not (eg Popouts), Vibration criteria, gas distribution and HPM storage requirements and local building codes (such
as building heights and depth below grade allowed) will also play into the optimum configuration along with the tool set.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">We have evaluated these types of configurations for such University Nanofab facilities as
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">Duke FCIEMAS cleanroom.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">MIT.nano<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">BRIDG/UCF<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">ASU Macrotechnology works<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">UC Berkeley<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">MTA in Vietnam<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">KAUST<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">U of Chicago WERC<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">USC Michelson Center for Convergent Bioscience<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">And many others.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">We have lots of photos we can also share.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">We would be happy to discuss further and you may contact me at the cell number below.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black">I am sure many of our colleagues on this network can chime in also!<o:p></o:p></span></p>
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<p class="MsoNormal" style="margin-bottom:8.0pt;line-height:105%"><b><span style="font-family:"Arial",sans-serif;color:black">Abbie Gregg<br>
</span></b><span style="font-family:"Arial",sans-serif;color:black">Chief Technology Officer<br>
Office: (480) 446-8000 xt 107 | Direct: (480) 530-0403<br>
Cell: (480) 577-5083<br>
Email: <a href="mailto:agregg@amts.com"><span style="color:black">agregg@amts.com</span></a></span><span style="color:black">
<br>
</span><b><span style="font-size:12.0pt;line-height:105%;color:#DD2F31">AM Technical Solutions, 1501 West Fountainhead Parkway, Suite 130 ,Tempe, AZ 85282<br>
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<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:navy">.
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Wing Leong CHUNG<br>
<b>Sent:</b> Friday, September 4, 2020 6:29 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Cleanroom structure<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear all, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">NFF of HKUST are planning to build a new cleanroom research facility. We want to know the pros and cons of a vertical structure (cleanroom with sub-fab)? Hope can give us some valuable suggestion.
<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">May I have some examples of cleanroom with vertical structure as well.
<br>
<br>
Many Thank. <o:p></o:p></p>
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<p class="MsoNormal">Jeff Chung<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Senior Manager, NFF, HKUST<o:p></o:p></p>
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<p class="MsoNormal"><a href="http://www.nff.ust.hk">www.nff.ust.hk</a> <o:p></o:p></p>
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