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<div class="PlainText">Hi Kevin.<br>
In the past on our old ECR etcher we had some success using double sided carbon tape to adhere onto a backing wafer. The tape comes in sheets from SEM supply stores. It was important to trim the tape to ~ 1mm smaller than the sample so it was not exposed to
the plasma.<br>
For removal we heated the backing wafer on a hotplate up to ~ 75 Deg C as I recall then gently peeled up the sample piece. I know it could could get messy if the sample doesn't some off right away, but acetone would usually clean it up. </div>
<div class="PlainText" dir="auto" style="text-align: left;">We were able to get black silicon at temperatures up to -25 deg C.</div>
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<div class="PlainText" dir="auto" style="text-align: left;">Rob<br>
<br>
-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> On Behalf Of Kevin M McPeak<br>
Sent: September 20, 2020 11:22 PM<br>
To: labnetwork@mtl.mit.edu<br>
Subject: [labnetwork] Crygenic Plasma Etching of Black Silicon<br>
<br>
[External Email]<br>
<br>
Dear Colleagues,<br>
<br>
We have a user at the LSU Nanofab that has developed a recipe for etching black Si into 4" Si wafers at cryogenic temperatures (-130 C) using our Oxford ICP100 tool. The user also wants to produce Black Si on small pieces, e.g. 1" x 1" Si pieces which are
attached to an Al masked Si carrier wafer. He is currently using Fomblin oil as a heat transfer agent between the Si chip and the carrier wafer (3 - 4 drops). Unfortunately, the small chips are giving him patchy black Si, whereas the whole 4" wafers are very
uniform.<br>
<br>
I suspect this issue is related to heat transfer across the Fomblin layer. He is currently waiting 2 minutes after loading the carrier + Si chip before striking the plasma. 3 - 4 drops of Fomblin between the carrier and 1" x 1" chip.<br>
<br>
Does anyone have experience with cryogenic etching of Black Si on chips? If so, I would very much appreciate your thoughts on best practices for achieving good heat transfer to the chips. Thanks in advance.<br>
<br>
Regards,<br>
Kevin<br>
<br>
--<br>
Kevin M. McPeak<br>
Assistant Professor | LSU Dept. of Chemical Engineering<br>
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication<br>
<br>
<br>
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