<div dir="ltr">Greetings,<div><br></div><div>I have an original STS ASE DRIE system that needs to have the SF6 input increased to optimize silicon etching performance.  My SF6 MFC is limited to 50 sccm in the software settings and I would like to increase that limit to 150 sccm.  The hardware has 500 sccm capability.  Does anyone have this experience/know how?  Thanks in advance!!!  </div><div><br clear="all"><div><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div dir="ltr"><div><font face="arial, sans-serif">Regards,</font></div><div dir="ltr"><font face="arial, sans-serif"><br></font></div><div dir="ltr"><font face="arial, sans-serif">Patrick Roman, PhD</font></div><div dir="ltr"><font face="arial, sans-serif">Associate Professor of Research<br></font><div><p style="margin:0in 0in 0.0001pt;color:rgb(32,31,30)"><font face="arial, sans-serif"><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial">Mechanical and Materials Engineering</span><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial"></span></font></p><p style="margin:0in 0in 0.0001pt;color:rgb(32,31,30)"><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial"><font face="arial, sans-serif"><span style="color:rgb(0,0,0)">Assistant Director, <a href="http://ameri.fiu.edu/" title="http://ameri.fiu.edu" style="color:rgb(17,85,204)" target="_blank">AMERI</a></span><br></font></span></p><p style="margin:0in 0in 0.0001pt;color:rgb(32,31,30)"><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial"><font face="arial, sans-serif">R&D Engineer, <a href="https://gfjc.fiu.edu/" target="_blank">GFJC</a>, <a href="https://www.nfstc.org/" target="_blank">NFSTC</a></font></span></p><p style="margin:0in 0in 0.0001pt;color:rgb(32,31,30)"><font face="arial, sans-serif"><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial">College of Engineering and Computing</span><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial"><br></span><span style="margin:0px;color:rgb(51,51,51);background-image:initial;background-position:initial;background-repeat:initial">Florida International University</span></font></p></div><div><font face="arial, sans-serif">10555 West Flagler Street, EC3355<br></font></div><div><font face="arial, sans-serif">Miami, Florida  33174</font></div><div><font face="arial, sans-serif">Tel (305) 348-1651</font></div><div><font face="arial, sans-serif">Fax (305) 348-1932</font></div><div><font face="arial, sans-serif">Cell (202) 294-8602</font></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div></div>