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<p class="MsoNormal">Patrick,<o:p></o:p></p>
<p class="MsoNormal"> If you can’t access and modify the configuration files, you will need the vendor to assist you.<o:p></o:p></p>
<p class="MsoNormal"> Best of luck,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Steve Paolini<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Principal Equipment Engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Harvard University Center for Nanoscale Systems<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">11 Oxford St.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Cambridge, MA 02138<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">617- 496- 9816<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">spaolini@cns.fas.harvard.edu<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt">www.cns.fas.harvard.edu</span><span style="font-size:14.0pt"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Patrick Roman<br>
<b>Sent:</b> Monday, October 19, 2020 2:21 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] STS DRIE mass flow controller programming<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Greetings,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I have an original STS ASE DRIE system that needs to have the SF6 input increased to optimize silicon etching performance. My SF6 MFC is limited to 50 sccm in the software settings and I would like to increase that limit to 150 sccm.
The hardware has 500 sccm capability. Does anyone have this experience/know how? Thanks in advance!!! <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Regards,</span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Patrick Roman, PhD</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Associate Professor of Research</span><o:p></o:p></p>
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<p style="margin:0in;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">Mechanical and Materials Engineering</span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:black">Assistant Director, <a href="https://urldefense.proofpoint.com/v2/url?u=http-3A__ameri.fiu.edu_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=kl-ROS_wuXVE3wGJPZKNxwo0kfAuIr8LS9ykvHQrSco&s=2-th-Nvz6RSbG1jBoEtYyWCzOXLeGZSPIp2wxOXVRnc&e=" target="_blank" title="http://ameri.fiu.edu"><span style="color:#1155CC">AMERI</span></a></span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">R&D Engineer,
<a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__gfjc.fiu.edu_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=kl-ROS_wuXVE3wGJPZKNxwo0kfAuIr8LS9ykvHQrSco&s=QgMwpzCCGholmvH1NTR30mxiGDnaNBWPrETwJF0epzU&e=" target="_blank">
GFJC</a>, <a href="https://urldefense.proofpoint.com/v2/url?u=https-3A__www.nfstc.org_&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=kl-ROS_wuXVE3wGJPZKNxwo0kfAuIr8LS9ykvHQrSco&s=Sd7EJFAvpB5ZcsLWsa477TW5ReTBKwc82g4D9_ffXE8&e=" target="_blank">NFSTC</a></span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0in;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">College of Engineering and Computing<br>
Florida International University</span><span style="color:#201F1E"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">10555 West Flagler Street, EC3355</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Miami, Florida 33174</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Tel (305) 348-1651</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Fax (305) 348-1932</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Cell (202) 294-8602</span><o:p></o:p></p>
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