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<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Hi Patrick,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">When you say an original STS ASE DRIE system can you please give some details on the software? Is it Win 3.1, a so called
trinity PC or a PRO tool?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">It sounds like they have scaled the software (or even made a mistake, maybe the MFC has been changed?) If the MFC is 500sccm
but the software is only allowing 50sccm to be selected then 50 will give you 5V to the MFC and an actual flow of 500sccm (normally the software scaling would be the other way around so 500sccm in the recipe to an actual 50sccm MFC to give you some accuracy
control, 355sccm in recipe to give 35.5 actual flow). <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">This control voltage can be easily checked by measuring the SP pin on the MFC connector. Run a recipe with 50sccm and
measure the voltage. If it is 5V then you are actually flowing 500sccm (if that is the full range of the MFC). Also check that the MFC is calibrated for SF6 sometimes they are N2 calibrated (there is a 0.26 conversion factor 500sccm x 0.26 gives an actual
SF6 flow of 130sccm max). Normally the software would take this into account. <o:p>
</o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Today you are able to buy MFC’s that can be re-programmed in-situ within a certain Window but you would need the correct
software and cables to do that and I’m sure the older SPTS didn’t use this type.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">We may be able to help if you would like to change the software settings to match the MFC, just write some more details
also about the software. There is some risk involved though changing software settings and MFC gas settings so it would be at your own risk. Crashed software cannot always be fixed these days and SPTS may not be able to help you recover the system.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">It would be easier for you to just change the MFC, keep the 50sccm setting but just calculate the difference if you are
unsure with the software.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Best regards<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Roy Cork<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">DTU Nanolab<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Denmark<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Patrick Roman<br>
<b>Sent:</b> 19. oktober 2020 20:21<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] STS DRIE mass flow controller programming<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Greetings,<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I have an original STS ASE DRIE system that needs to have the SF6 input increased to optimize silicon etching performance. My SF6 MFC is limited to 50 sccm in the software settings and I would like to increase that limit to 150 sccm.
The hardware has 500 sccm capability. Does anyone have this experience/know how? Thanks in advance!!! <o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Regards,</span><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Patrick Roman, PhD</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Associate Professor of Research</span><o:p></o:p></p>
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<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">Mechanical and Materials Engineering</span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:black">Assistant Director, <a href="http://ameri.fiu.edu/" target="_blank" title="http://ameri.fiu.edu"><span style="color:#1155CC">AMERI</span></a></span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">R&D Engineer,
<a href="https://gfjc.fiu.edu/" target="_blank">GFJC</a>, <a href="https://www.nfstc.org/" target="_blank">NFSTC</a></span><span style="color:#201F1E"><o:p></o:p></span></p>
<p style="margin:0cm;margin-bottom:.0001pt"><span style="font-family:"Arial",sans-serif;color:#333333">College of Engineering and Computing<br>
Florida International University</span><span style="color:#201F1E"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">10555 West Flagler Street, EC3355</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Miami, Florida 33174</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Tel (305) 348-1651</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Fax (305) 348-1932</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Arial",sans-serif">Cell (202) 294-8602</span><o:p></o:p></p>
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