<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=iso-8859-1">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:"Lucida Calligraphy";
panose-1:3 1 1 1 1 1 1 1 1 1;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.5in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
p.msonormal0, li.msonormal0, div.msonormal0
{mso-style-name:msonormal;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
p.gmail-m-792831686779737983msolistparagraph, li.gmail-m-792831686779737983msolistparagraph, div.gmail-m-792831686779737983msolistparagraph
{mso-style-name:gmail-m_-792831686779737983msolistparagraph;
mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle19
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:#1F497D;}
span.EmailStyle20
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:windowtext;}
span.EmailStyle21
{mso-style-type:personal;
font-family:"Calibri",sans-serif;
color:#1F497D;}
span.EmailStyle23
{mso-style-type:personal-compose;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:1825707094;
mso-list-type:hybrid;
mso-list-template-ids:1998241932 67698705 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l0:level1
{mso-level-text:"%1\)";
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-.25in;}
@list l0:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Lino,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">You are getting good ideas for the resist but you are correct that you’ll need to do something to level the sample during contact, if you are in fact using a
contact aligner. We were less concerned about breaking the sample/mask (although that is of course a concern) but more with the uniformity of the contact, which leads to poor resolution and/or definition.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We had a post doc work out this plan.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><span style="mso-list:Ignore">1)<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Pattern and etch a grid with alpha numeric labels across a full wafer.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><span style="mso-list:Ignore">2)<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Place your sample piece onto the wafer above using a VERY small drop of DI water on the back of your sample (make sure it doesn’t wick to the front
of the sample). We use the size of a drip from the end of a pipette, so that it just barely spreads out across the sample (when in contact).<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo1"><![if !supportLists]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><span style="mso-list:Ignore">3)<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Place dummy samples of the same thickness on the patterned alpha numeric wafer to ensure the mask/wafer pieces are level during wedge compensation.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">This has worked VERY well for me, even in the case of thin flexible materials (Kapton). The reason for the labeled wafer is that you can use it again if you
need to do alignment. You have to note where you placed the sample the first time but it reduces the “search and find” alignment strategy on your subsequent layers.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">If you are interested I’ll look for those wafers tomorrow and send you a few images. We made some to keep on hand.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Good luck!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Aimee Bross Price<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Sr. Research Associate
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">The Ohio State University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Nanotech West Lab<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Institute for Materials Research<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">1381 Kinnear Road<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Suite 100<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">Columbus, OH 43212<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">614-292-2753<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Lino Eugene<br>
<b>Sent:</b> Monday, November 16, 2020 5:39 PM<br>
<b>To:</b> Orad Reshef <orad@reshef.ca>; Nathanael Sieb <sieb@4dlabs.ca>; Michael Rooks <michael.rooks@yale.edu>; Carsen Kline <carsen@stanford.edu><br>
<b>Cc:</b> 'labnetwork@mtl.mit.edu' <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Resist coating of tiny pieces<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Dear Orad, Michael, Nathanael and Carsen,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks for your reply. It is good to know that mounting a tiny piece on a carrier wafer is sufficient for EBL.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Sorry for not providing the context . We have currently an user who wants to plasma etch several microns of dielectric on a diced chip of ~3 mmx
3 mm. A thick photoresist is needed and I think that just mounting the chip on a carrier wafer would not work well. I was suggested to use dummy pieces placed all around the chip, which should work well for this process. Also, I believe that this would avoid
also to break the chip or the carrier wafer (or the photomask?) because of the pressure applied during the wedge compensation on the mask aligner but maybe there is nothing to be worried about.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Best,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Lucida Calligraphy";color:#1F4E79">Lino Eugene, P.Eng., Ph.D.,<o:p></o:p></span></b></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79">Micro/nanofabrication process engineer<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79">Quantum Nano-Fabrication and Characterization Facility<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79">QNC 1611<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">University of Waterloo<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">200 University Avenue West<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">Waterloo, ON, Canada <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">N2L 3G1</span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">Ph: +1 519-888-4567 #37788<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79">Cell: +1 226-929-1685</span><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif;color:#1F4E79">Website:
<a href="https://urldefense.com/v3/__https:/qnfcf.uwaterloo.ca/__;!!KGKeukY!lJpDRMwMq7tjme5BDs-NgI4GdVjNh5FkEm0LEO7cZ_6JOLZbys7A3NdKBOhuJ5Z9nRU$">
<span style="color:#1F4E79">https://qnfcf.uwaterloo.ca/</span></a></span><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F4E79"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> Orad Reshef [<a href="mailto:orad@reshef.ca">mailto:orad@reshef.ca</a>]
<br>
<b>Sent:</b> November 16, 2020 16:19<br>
<b>To:</b> Lino Eugene <<a href="mailto:lino.eugene@uwaterloo.ca">lino.eugene@uwaterloo.ca</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Resist coating of tiny pieces<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-CA">Dear Lino,<o:p></o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">We need a little more context for what you consider a "tiny piece". I routinely work with 1x1 cm pieces, and for those we use chucks that have an o-ring about 0.5 cm in diameter.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">I have colleagues who have worked with 1mm x 1mm square diced samples. They mounted those on a large si handle wafer using double-sided carbon tape, like you would use to mount a sample on an SEM stub.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">Hope this helps,<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA">Orad<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><br clear="all">
<o:p></o:p></span></p>
<div>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><span lang="EN-CA">Orad Reshef, PhD<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal"><span lang="EN-CA"><br>
Département de physique | Department of Physics<br>
Université d’Ottawa | University of Ottawa<br>
<a href="https://urldefense.com/v3/__http:/boydnlo.ca__;!!KGKeukY!lJpDRMwMq7tjme5BDs-NgI4GdVjNh5FkEm0LEO7cZ_6JOLZbys7A3NdKBOhuIeMYg3Q$" target="_blank">boydnlo.ca</a> |
<a href="https://urldefense.com/v3/__http:/reshef.ca__;!!KGKeukY!lJpDRMwMq7tjme5BDs-NgI4GdVjNh5FkEm0LEO7cZ_6JOLZbys7A3NdKBOhu9TBqguU$" target="_blank">
reshef.ca</a><o:p></o:p></span></p>
</div>
</div>
</div>
</div>
</div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<div>
<div>
<p class="MsoNormal"><span lang="EN-CA">On Mon, Nov 16, 2020 at 11:44 AM Lino Eugene <<a href="mailto:lino.eugene@uwaterloo.ca">lino.eugene@uwaterloo.ca</a>> wrote:<o:p></o:p></span></p>
</div>
<blockquote style="border:none;border-left:solid #CCCCCC 1.0pt;padding:0in 0in 0in 6.0pt;margin-left:4.8pt;margin-top:5.0pt;margin-right:0in;margin-bottom:5.0pt">
<div>
<div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Dear colleagues,<o:p></o:p></span></p>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">We are having more users who work on tiny pieces to be coated with photo and e-beam resist.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">I am thinking of different ways to coat these pieces:<o:p></o:p></span></p>
</div>
<div>
<p class="gmail-m-792831686779737983msolistparagraph"><span lang="EN-CA" style="font-family:Symbol">ˇ</span><span lang="EN-CA" style="font-size:7.0pt">
</span><span lang="EN-CA">custom chucks with a recess of the size of the chip<o:p></o:p></span></p>
</div>
<div>
<p class="gmail-m-792831686779737983msolistparagraph"><span lang="EN-CA" style="font-family:Symbol">ˇ</span><span lang="EN-CA" style="font-size:7.0pt">
</span><span lang="EN-CA">Si carrier wafer with recess etched by SF6 plasma<o:p></o:p></span></p>
</div>
<div>
<p class="gmail-m-792831686779737983msolistparagraph"><span lang="EN-CA" style="font-family:Symbol">ˇ</span><span lang="EN-CA" style="font-size:7.0pt">
</span><span lang="EN-CA">MicroSpray photoresist<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">I am wondering if you could share the techniques you use to get uniform coating on very small pieces.<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA">Best,<o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Lucida Calligraphy""> </span></b><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><b><span lang="EN-CA" style="font-size:11.0pt;font-family:"Lucida Calligraphy"">Lino Eugene, P.Eng., Ph.D.,</span></b><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Micro/nanofabrication process engineer</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Quantum-Nano Fabrication and Characterization Facility</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">QNC 1611</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">University of Waterloo</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">200 University Avenue West</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">Waterloo, ON, Canada </span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">N2L 3G1</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif"> </span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">Ph: +1 519-888-4567 #37788</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA" style="font-size:11.0pt;font-family:"Calibri",sans-serif">Cell: +1 226-929-1685</span><span lang="EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span style="font-size:10.5pt;font-family:"Calibri",sans-serif">Website:<span style="color:black">
<a href="https://urldefense.com/v3/__https:/fab.qnc.uwaterloo.ca/__;!!KGKeukY!lJpDRMwMq7tjme5BDs-NgI4GdVjNh5FkEm0LEO7cZ_6JOLZbys7A3NdKBOhuWtUGD3w$" target="_blank">
https://fab.qnc.uwaterloo.ca/</a></span></span><span lang="EN-CA"><o:p></o:p></span></p>
</div>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><span lang="EN-CA"> <o:p></o:p></span></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;margin-bottom:12.0pt"><span lang="EN-CA"> <o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><span lang="EN-CA">_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!KGKeukY!lJpDRMwMq7tjme5BDs-NgI4GdVjNh5FkEm0LEO7cZ_6JOLZbys7A3NdKBOhuxd3pUMU$" target="_blank">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></span></p>
</blockquote>
</div>
</div>
</body>
</html>