<html><head><meta http-equiv="content-type" content="text/html; charset=utf-8"></head><body dir="auto">We have successfully sputtered silicon if that helps.<div><br></div><div>John<br><br><div dir="ltr">Sent from my iPhone</div><div dir="ltr"><br><blockquote type="cite">On Nov 28, 2020, at 12:48 PM, Shimon Eliav <shimonel@savion.huji.ac.il> wrote:<br><br></blockquote></div><blockquote type="cite"><div dir="ltr">
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Chris,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Some months ago I developed an e-beam recipe for Si evaporation.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I used FABMATE crucible and very standard procedure for e-beam deposition using a Telemark 6kW source (Soak 1, Ramp1, Ramp2, Soak 2 and Deposition phase). The
rate deposition was set to 0.5 A/sec and we use to deposit 80nm layers followed by successful lift-off process. In the end of the process the crucible is cooled down gently to avoid cracks.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The crucible survives the process and can be used many times. The deposition process itself is smooth. The chamber receives a brown color by the end of the deposition
and for this thickness range we had not flakes.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">If you need more details feel free to contact me.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shimon<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The Unit for Nano Fabrication<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The Hebrew University of Jerusalem<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">ISRAEL<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></a></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Christopher Balicki<br>
<b>Sent:</b> Friday, 27 November 2020 21:39<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Silicon ebeam evaporation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p><span style="font-family:"Calibri",sans-serif;color:black">Hi All,<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">Hope you are all well and keeping safe.<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">We have received some interest from our users to provide a silicon evaporation process. Based on initial investigation, it appears that thermal evaporation is pretty much impossible and that ebeam
evaporation could yield some results. That said, molten silicon is corrosive and pretty much alloys with anything it touches. If we were to use a crucible liner, the top candidate liner materials are copper, tantalum, and tungsten, however, liner lifetime
and performance is unknown. And if we were to evaporate directly in the copper hearth, this would permanently assign the pocket to silicon, and potentially necessitate a hearth replacement at some point.<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">Our top concerns are to (of course) maintain the safety and reliability of our PVD systems for our whole userbase. A silicon evaporation process would have to be robust and not cause excessive equipment
downtime.<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">Any advice and/or recommendations based on experience would be highly appreciated!<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">Cheers,<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black">Chris<o:p></o:p></span></p>
<p><span style="font-family:"Calibri",sans-serif;color:black"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black">Christopher Balicki</span></b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:black"><br>
Fabrication and Prototyping Manager | 4D LABS<br>
Simon Fraser University | TASC 2<br>
8888 University Dr., Burnaby, B.C. V5A 1S6<br>
T: 778 782 9322 | F: 778 782 3765 | <a href="http://www.4dlabs.ca/" id="LPNoLP">www.4dlabs.ca</a><br>
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LinkedIn</a></span><span style="font-family:"Calibri",sans-serif;color:black"> <o:p>
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