<div dir="auto">Yeah Mike...I was going to recommend Matt...as he’s still servicing many of these early tools. </div><div dir="auto"><br></div><div dir="auto">There are some minor differences on the early systems like the PG, but usually if you don’t start tweaking the stage servo pots, you can get the stage mechanics back in shape and it should play nice. </div><div dir="auto"><br></div><div dir="auto">An important pm service is an annual stage pull... where are you remove the stages from the system and clean them all up...the undersides have some bearings and Rulon shoes, as well as rack and pinion gearing that need to be cleaned up and lubricated, as well as cleaning and re-lubricating the surfaces that these shoes slide on. We call them keys and ways. If the stage doesn’t move freely by its design, because of gunked up oil underneath the stage where you can’t reach for cleaning, it definitely slows them down and that’s when you start getting into timing issues on a pattern generator as it’s trying to originate...hence Auto Focus failure (which tends to be the first error message in the software that it likes to toss out).</div><div dir="auto"><br></div><div dir="auto">I’ve also found that if the speed of the stage during OG is too slow to reach the load position, autofocus failure...so it’s a balance game. </div><div dir="auto"><br></div><div dir="auto">Check in with Matt and see how that goes!!</div><div dir="auto"><br></div><div dir="auto">Best,</div><div dir="auto">G~</div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Fri, Dec 4, 2020 at 3:15 PM Matt Pace <<a href="mailto:matt@3ctechnical.com">matt@3ctechnical.com</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><img src="https://s3.amazonaws.com/mailscanner/images/1x1spacer.gif" width="0px" height="0px" alt="Web Bug from https://share.polymail.io/v2/z/a/NWZjYWMxMzkxYTY2/olXbUaEwFCT2k_XdKImiY0CW8P09q0TyTM2OPuyrMhS1mH9_zzwUrpuXzr6jknGAcZkMfA2ZTdaugWXeCEfa9W-hptAzNSEEH9WmgqH2GvkRMC5ozTDfec7YJhcv981cvxIIzy2CHCPPBrIQY7IgbxE2SQ==.png" /><div>Hi Mike,</div><div><br></div><div>I used to work for Bob Scruton (as did one of my employees, Mike Arnold), many moons ago. Bob was definitely the expert when it came to these older GCA pattern generators, but the 3600F is very similar to a GCA 4800 or even 6300 - especially in regards to the stages, Both Mike and I have worked on the 3600s here and there, so we may be able to help you out a bit.</div><div><br></div><div>Unfortunately we don't have many PG parts because the demand for servicing them mostly dried up and we focused in on taking care of the new GCA tools instead. Regardless, if you can provide more details on the errors (maybe send some pictures of the actual errors printed on the screen) and describe what you are running when you get the particular errors, we'll put our heads together and see what you may be up against.</div><div><br></div><div>All the best,</div><div>Matt</div><div><br></div><div id="m_-3937514364785473773psignature"><p style="font-family:arial,sans-serif;font-size:12.8px;line-height:normal;margin:0in 0in 0pt;background-color:rgb(255,255,255);color:rgb(34,34,34)"><span style="font-size:10pt;font-family:arial,sans-serif"><font face="courier new,monospace" style="font-family:"courier new",monospace;color:rgb(34,34,34)">---</font></span></p>
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<p style="font-family:arial,sans-serif;font-size:12.8px;line-height:normal;margin:0in 0in 0pt;background-color:rgb(255,255,255);color:rgb(34,34,34)"><span style="font-size:10pt;font-family:arial,sans-serif"><font face="courier new,monospace" style="font-family:"courier new",monospace;color:rgb(34,34,34)"><span id="m_-3937514364785473773gc-number-40" title="Call with Google Voice" style="text-decoration:underline;font-family:"courier new",monospace;color:rgb(0,51,187)">480-963-4559</span> voice</font></span></p></div><div class="gmail_extra"><br><div class="gmail_quote"><div dir="ltr">On Fri, Dec 4th, 2020 at 11:12 AM, Greg Mullins <<a href="mailto:gregmullins@berkeley.edu" target="_blank">gregmullins@berkeley.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><div>
<div>Hi Mike,</div><div dir="auto">I used to work with RZ Enterprises, and we did service all GCA tools, including pattern generators…In fact I still have one that I take care of here at Berkeley. Let me put together some information later today to see if I can help you through this, and also I will put out feelers on who is still servicing them.</div><div dir="auto">Best,</div><div dir="auto">G~</div><div><br><div><div> </div></div></div></div><div dir="ltr">On Fri, Dec 4, 2020 at 8:54 AM Michael Call <<a href="mailto:michael.call@maine.edu" rel="nofollow noopener noreferrer" target="_blank">michael.call@maine.edu</a>> wrote:<br></div><blockquote style="margin:0px 0px 0px 0.8ex;border-left-width:1px;border-left-style:solid;padding-left:1ex;border-left-color:rgb(204,204,204)"><div dir="ltr"><div>We have an issue with "Focus Signal lost" and "time out" errors on our pattern generator. Sometimes the column will attempt to focus off of the glass plate(laser system losing counts?). I've cleaned and oiled the stages, changed plates and all of the usual, but with no luck. I know that Bob Scruton passed away a few years ago. Has anyone taken over the service of these machines?</div><div><br></div><div>Thanks,<br></div><div><div><br>-- <br><div dir="ltr" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div>Mike Call <br>Research Engineer<br>University of Maine <br></div><div>Frontier Institute for Research in Sensor Technologies (FIRST)</div><div>Coordinated Research entities Cleanroom </div><div>ESRB Barrows Hall room 294<br></div><div>207-581-3382</div><div><img alt="image.png" style="width: 812px; max-width: 100%;"></div></div></div></div></div></div></div></div></div></div>
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</blockquote>-- <br><div dir="ltr" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div><span style="font-size:12.8px">Greg Mullins</span></div><div>R&D Engineer 4</div><div> </div><div>Marvell Nanofabrication Laboratory<br>University of California at Berkeley</div><div>520 Sutardja Dai Hall, MS 1754<br>Berkeley, CA 94720-1754<br>Office: (510) 809-8625<br></div><div>Email: <a href="mailto:gregmullins@berkeley.edu" rel="nofollow noopener noreferrer" target="_blank">gregmullins@berkeley.edu</a></div></div></div></div></div></div></div></div></blockquote></div><br></div></blockquote></div></div>-- <br><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div><span style="font-size:12.8px">Greg Mullins</span></div><div>R&D Engineer 4</div><div> </div><div>Marvell Nanofabrication Laboratory<br>University of California at Berkeley</div><div>520 Sutardja Dai Hall, MS 1754<br>Berkeley, CA 94720-1754<br>Office: (510) 809-8625<br></div><div>Email: <a href="mailto:gregmullins@berkeley.edu" target="_blank">gregmullins@berkeley.edu</a></div></div></div></div></div></div></div></div>