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/* Font Definitions */
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{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
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text-decoration:underline;}
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font-family:"Calibri",sans-serif;
color:windowtext;}
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margin:1.0in 1.0in 1.0in 1.0in;}
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--></style><!--[if gte mso 9]><xml>
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</xml><![endif]--><!--[if gte mso 9]><xml>
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<o:idmap v:ext="edit" data="1" />
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<p class="MsoNormal">Hi Nava,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have replaced it. It’s very simple. Remove the lamp. There are 3 or 4 hex screws with a rectangle shaped washer that holds the mirror in place. With the housing laying on it’s side, remove the screws and washers. Remove the mirror
without touching the reflective aluminum surface (grab at the lamp feed through hole at the top) and remove it.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would not purchase the mirror from Suss. I have done so in the past and the aluminum flaked off within a year. I purchased one from Class One Equipment and it has lasted several years. It was also 1/4<sup>th</sup> of the cost from
Suss. Not sure who manufactured the mirror but probably Edmund Optics or similar vendor.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Bill Lewis<o:p></o:p></p>
<p class="MsoNormal">Research Service Center<o:p></o:p></p>
<p class="MsoNormal">University of Florida<o:p></o:p></p>
<p class="MsoNormal">1041 Center Dr<o:p></o:p></p>
<p class="MsoNormal">Gainesville, FL 32611<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Nava Ariel-Sternberg<br>
<b>Sent:</b> Monday, January 4, 2021 12:21 PM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] SUSS mask aligner consumable replacement<o:p></o:p></p>
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<b><span style="font-size:9.0pt;font-family:"Arial",sans-serif;color:#FA4616">[External Email]</span></b>
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<p class="MsoNormal">Hi all, <o:p></o:p></p>
<p class="MsoNormal">I hope you all had a good and relaxing break. Happy New Year!
<o:p></o:p></p>
<p class="MsoNormal">I was hoping to see if anyone has ever replaced the ellipsoidal reflector in a SUSS mask aligner and can provide some assistance/tips. It shouldn’t be too complicated but we want to make sure we do it right and don’t miss anything that
could potentially degrade the tool’s performance. <o:p></o:p></p>
<p class="MsoNormal">The company is refusing to help us. <o:p></o:p></p>
<p class="MsoNormal">Any procedures/pointers would be greatly appreciated!<o:p></o:p></p>
<p class="MsoNormal">Nava<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Nava Ariel-Sternberg, Ph.D.<o:p></o:p></p>
<p class="MsoNormal">Director of CNI Shared Labs<o:p></o:p></p>
<p class="MsoNormal">Columbia University<o:p></o:p></p>
<p class="MsoNormal">CEPSR/MC 8903 <o:p></o:p></p>
<p class="MsoNormal">530 west 120<sup>th</sup> st. NY<o:p></o:p></p>
<p class="MsoNormal">NY 10027<o:p></o:p></p>
<p class="MsoNormal">Office: 212-8549927<o:p></o:p></p>
<p class="MsoNormal">Cell: 201-5627600<o:p></o:p></p>
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