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<p class="MsoNormal"><span style="color:#1F497D">Robert,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">If you can observe it, see how long the match takes to tune. You might have a blown air-cap (they arc from time to time) and they’ll try to tune for a long period of time.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I don’t use a Tepla system but I have seen this on old Matrix ashers in need of new match networks.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Any questions, contact me directly.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Good luck,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Jeff<o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:105%"><b><span style="font-size:12.0pt;line-height:105%;color:#19325D">Jeff Salzmann</span></b><b><span style="font-size:12.0pt;line-height:105%;color:#19325D"><o:p></o:p></span></b></p>
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.0pt;line-height:105%;color:black;border:none windowtext 1.0pt;padding:0in">Research and Development Engineering</span><span style="font-size:10.0pt;line-height:105%;color:#1F4E79"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%"><a href="http://www.pcb.com/"><span style="font-size:10.0pt;line-height:105%;color:#19325D;border:none windowtext 1.0pt;padding:0in">PCB Piezotronics</span></a><b><span style="font-size:10.0pt;line-height:105%;color:#002E5F;border:none windowtext 1.0pt;padding:0in"> |
</span></b><b><span style="font-size:10.0pt;line-height:105%;color:black;border:none windowtext 1.0pt;padding:0in">716 684 0002 ext 2907</span></b><span style="font-size:10.0pt;line-height:105%;font-family:"Arial",sans-serif;color:#222A35"><o:p></o:p></span></p>
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<p class="MsoNormal"><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Robert Vandusen<br>
<b>Sent:</b> Monday, January 25, 2021 14:35<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] Tepla PS210 question<o:p></o:p></p>
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<p class="MsoNormal"><strong><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:yellow">External Email Notice: This email originated from outside the MTS / PCB organization.</span></strong><o:p></o:p></p>
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<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Hello community.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">I have a question for anyone who may have a Tepla PS210 plasma ashing system.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">We have noticed that our plasma may look dimmer and more unstable than normal.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">We seem to be etching but need to verify our etch rates.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">One of the things we noticed is that even thought actual power output display on the runscreen is reading the setpoint of 500W,
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">on the maintenance screen we see a value of ~ 120 on the output. I would have expected this to read to close to the setpoint,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">but we are not completely sure if this is problem as we hadn’t looked at this before.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Tepla hasn’t been able to confirm for sure whether this is a problem.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">If someone would be able to check on another system to confirm that would be great.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><img border="0" width="417" height="299" style="width:4.3437in;height:3.1145in" id="Picture_x0020_3" src="cid:image005.jpg@01D6F33A.7AC67ED0"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><img border="0" width="429" height="219" style="width:4.4687in;height:2.2812in" id="Picture_x0020_4" src="cid:image006.jpg@01D6F33A.7AC67ED0"> <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA">Rob<o:p></o:p></span></p>
<p class="MsoNormal" style="background:white"><span lang="EN-CA" style="font-size:10.0pt;font-family:"Helvetica",sans-serif;mso-fareast-language:EN-CA">Robert Vandusen<br>
Technical Officer, Microfabrication Lab<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
<a href="tel:613-520-2600"><span style="color:blue">613-520-2600</span></a> ext 5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca" target="_blank"><span style="color:blue">Robert_vandusen@cunet.carleton.ca</span></a></span><span lang="EN-CA" style="font-size:9.0pt;font-family:"Helvetica",sans-serif;mso-fareast-language:EN-CA"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA"><o:p> </o:p></span></p>
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