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<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hi Scott and others.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">It turns out we may be ok. Tepla said the output value we are seeing is bogus(shouldn’t be showing up) and that some flickering of the microwave plamsa is normal.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">We are going to be running some etch rate tests to confirm everything is ok, although we may have a bad or weakening magnetron.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Thanks<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Rob<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> Scott Blondell <spb1699@rit.edu>
<br>
<b>Sent:</b> January 26, 2021 10:08 AM<br>
<b>To:</b> Jeff Salzmann <jsalzmann@pcb.com>; Robert Vandusen <RobertVandusen@cunet.carleton.ca>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: Tepla PS210 question<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal" style="line-height:11.0pt"><span style="font-size:10.0pt;color:black">[External Email]<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Robert, as Jeff mentioned, visually check your tunable caps and other components for any signs of arcing/overheating. Do you have any indication of reflected power levels?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Verify all power connections are clean and tight. Is there excessive build-up of resist residue, etc. on the electrode insulators? This would manifest
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">as arcing or flickering plasma and higher than normal reflected power. Any reason to suspect the power source (tube or solid state section) of the supply is reaching end of life?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Do you have an RF power meter and/or dummy load you can use as a test to eliminate the chamber being the problem?<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Not sure how to interpret the discrepancy between your power readings.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US" style="font-size:16.0pt;font-family:"Times New Roman",serif;color:#1F497D">Scott P. Blondell<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Times New Roman",serif;color:#1F497D">Facilities Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Times New Roman",serif;color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><a href="http://www.smfl.rit.edu/" target="_blank"><span style="color:blue">Semiconductor & Microsystems Fabrication Laboratory</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Times New Roman",serif;color:#1F497D">82 Lomb Memorial Dr.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Times New Roman",serif;color:#1F497D">Bldg. 17-2519<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-family:"Times New Roman",serif;color:#1F497D">Rochester, NY 14623<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">585 738-4073 c<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">585 475-2171 o<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">585 475-5041 f<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><a href="mailto:spb1699@rit.edu"><span style="color:blue">spb1699@rit.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><a href="http://www.smfl.rit.edu"><span style="color:blue">www.smfl.rit.edu</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Jeff Salzmann<br>
<b>Sent:</b> Monday, January 25, 2021 4:53 PM<br>
<b>To:</b> Robert Vandusen <<a href="mailto:RobertVandusen@cunet.carleton.ca">RobertVandusen@cunet.carleton.ca</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] Tepla PS210 question<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Robert,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">If you can observe it, see how long the match takes to tune. You might have a blown air-cap (they arc from time to time) and they’ll try to tune for a long period of time.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">I don’t use a Tepla system but I have seen this on old Matrix ashers in need of new match networks.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Any questions, contact me directly.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Good luck,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D">Jeff<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US" style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal" style="line-height:105%"><a href="http://www.pcb.com/"><span style="color:#222A35;text-decoration:none"><img border="0" width="128" height="74" style="width:1.3333in;height:.7708in" id="Picture_x0020_1" src="cid:image002.png@01D6F3CD.2CBA9940"></span></a><span style="color:#222A35"><o:p></o:p></span></p>
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<p class="MsoNormal" style="line-height:105%"><b><span style="font-size:4.0pt;line-height:105%;font-family:"Arial",sans-serif;color:#00305E"><o:p> </o:p></span></b></p>
<p class="MsoNormal" style="line-height:105%"><b><span style="font-size:12.0pt;line-height:105%;color:#19325D">Jeff Salzmann<o:p></o:p></span></b></p>
<p class="MsoNormal" style="line-height:105%"><span style="font-size:10.0pt;line-height:105%;color:black;border:none windowtext 1.0pt;padding:0cm">Research and Development Engineering</span><span style="font-size:10.0pt;line-height:105%;color:#1F4E79"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:105%"><a href="http://www.pcb.com/"><span style="font-size:10.0pt;line-height:105%;color:#19325D;border:none windowtext 1.0pt;padding:0cm">PCB Piezotronics</span></a><b><span style="font-size:10.0pt;line-height:105%;color:#002E5F;border:none windowtext 1.0pt;padding:0cm"> |
</span></b><b><span style="font-size:10.0pt;line-height:105%;color:black;border:none windowtext 1.0pt;padding:0cm">716 684 0002 ext 2907</span></b><span style="font-size:10.0pt;line-height:105%;font-family:"Arial",sans-serif;color:#222A35"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><img border="0" width="624" height="182" style="width:6.5in;height:1.8958in" id="Picture_x0020_2" src="cid:image003.jpg@01D6F3CD.2CBA9940"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Robert Vandusen<br>
<b>Sent:</b> Monday, January 25, 2021 14:35<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Tepla PS210 question<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><strong><span style="font-size:10.0pt;font-family:"Calibri",sans-serif;color:yellow">External Email Notice: This email originated from outside the MTS / PCB organization.</span></strong><o:p></o:p></p>
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<o:p></o:p></span></p>
<p class="MsoNormal">Hello community.<o:p></o:p></p>
<p class="MsoNormal">I have a question for anyone who may have a Tepla PS210 plasma ashing system.<o:p></o:p></p>
<p class="MsoNormal">We have noticed that our plasma may look dimmer and more unstable than normal.<o:p></o:p></p>
<p class="MsoNormal">We seem to be etching but need to verify our etch rates.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">One of the things we noticed is that even thought actual power output display on the runscreen is reading the setpoint of 500W,
<o:p></o:p></p>
<p class="MsoNormal">on the maintenance screen we see a value of ~ 120 on the output. I would have expected this to read to close to the setpoint,<o:p></o:p></p>
<p class="MsoNormal">but we are not completely sure if this is problem as we hadn’t looked at this before.<o:p></o:p></p>
<p class="MsoNormal">Tepla hasn’t been able to confirm for sure whether this is a problem.<o:p></o:p></p>
<p class="MsoNormal">If someone would be able to check on another system to confirm that would be great.<o:p></o:p></p>
<p class="MsoNormal"><img border="0" width="417" height="299" style="width:4.3437in;height:3.1145in" id="Picture_x0020_3" src="cid:image004.jpg@01D6F3CD.2CBA9940"><o:p></o:p></p>
<p class="MsoNormal"><img border="0" width="429" height="219" style="width:4.4687in;height:2.2812in" id="Picture_x0020_4" src="cid:image005.jpg@01D6F3CD.2CBA9940"> <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks<o:p></o:p></p>
<p class="MsoNormal">Rob<o:p></o:p></p>
<p class="MsoNormal" style="background:white"><span style="font-size:10.0pt;font-family:"Helvetica",sans-serif">Robert Vandusen<br>
Technical Officer, Microfabrication Lab<br>
Electronics Department<br>
Carleton University<br>
room: 4184 Mackenzie Building<br>
<a href="tel:613-520-2600"><span style="color:blue">613-520-2600</span></a> ext 5761<br>
<a href="mailto:Robert_vandusen@cunet.carleton.ca" target="_blank"><span style="color:blue">Robert_vandusen@cunet.carleton.ca</span></a></span><span style="font-size:9.0pt;font-family:"Helvetica",sans-serif"><o:p></o:p></span></p>
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