<div dir="ltr">Howdy All,<div>We are having issues with a scroll pump for the load lock on an ASM Polygon 8200 Cluster tool. Does anyone have a recommendation for a better type of pump and model to use? I understand a pump capable of 16 cfm that can maintain 1 - 3 T should do the trick.</div><div><br></div><div>Thanks!<br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><p class="MsoNormal" style="margin-right:0in;margin-left:0in;font-size:12pt;font-family:"Times New Roman",serif;color:rgb(34,34,34)"><b><span style="font-size:9pt;font-family:Arial,sans-serif;color:black">Sandra G. Malhotra, Ph.D.</span></b><span style="font-size:9pt;font-family:Arial,sans-serif;color:black">  |  Technical Lab Manager</span><u></u><u></u></p><p class="MsoNormal" style="margin-right:0in;margin-left:0in;font-size:12pt;font-family:"Times New Roman",serif;color:rgb(34,34,34)"><span style="font-size:9pt;font-family:Arial,sans-serif;color:black">AggieFab Nanofabrication Facility<br>Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University<br>3253 TAMU | College Station, TX 77843<br>ph: 979.845.3199  |  </span><span style="color:rgb(31,73,125)"><span style="color:rgb(17,85,204);font-size:9pt;font-family:Arial,sans-serif"><a href="mailto:hprichard@tamu.edu" style="color:rgb(17,85,204)" target="_blank">s</a><a href="mailto:andra.malhotra@tamu.edu" target="_blank">andra.malhotra@tamu.edu</a></span></span><span style="font-size:9pt;font-family:Arial,sans-serif;color:black"><br>- - - - - - - - - - - - - - - - - - - - - - - - <br></span><b><span style="font-size:9pt;font-family:Arial,sans-serif;color:rgb(80,0,0)">TEXAS A&M UNIVERSITY</span></b><span style="font-size:9pt;font-family:Arial,sans-serif;color:rgb(80,0,0)"> | FEARLESS on Every Front</span></p></div></div></div></div>