<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 15 (filtered medium)">
<!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
p.MsoListParagraph, li.MsoListParagraph, div.MsoListParagraph
{mso-style-priority:34;
margin-top:0cm;
margin-right:0cm;
margin-bottom:0cm;
margin-left:36.0pt;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri",sans-serif;}
span.EmailStyle20
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:1316060897;
mso-list-type:hybrid;
mso-list-template-ids:510719640 -1867110800 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l0:level1
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
margin-left:54.0pt;
text-indent:-36.0pt;}
@list l0:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level4
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l0:level7
{mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:none;
mso-level-number-position:left;
text-indent:-18.0pt;}
@list l0:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:none;
mso-level-number-position:right;
text-indent:-9.0pt;}
ol
{margin-bottom:0cm;}
ul
{margin-bottom:0cm;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1027" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-AU" link="#0563C1" vlink="#954F72">
<div class="WordSection1">
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Hi James,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">I am sure there are some already out there. This might not help you in the short term but at ANFF here in Australia have decided to build our own. We are in the building phase at the moment but
we hope to have something usable in place by the middle of the year. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">I would be happy to ask this group to take a look at the resource and provide comment. We do intend to make it open access once we are happy with it.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">It will have Fabrication area modules to cover the general theory (deposition, etching, lithography etc) and these will then have technique specific courses related to them (Sputtering, EB evap,
etc for deposition). Some of the fab area courses will also have example process flows for devices but these will be later in the development.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Cheers<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US">Jane<o:p></o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<div>
<table class="MsoNormalTable" border="0" cellspacing="0" cellpadding="0" style="border-collapse:collapse">
<tbody>
<tr style="height:121.6pt">
<td width="179" valign="top" style="width:134.2pt;border-top:solid white 1.0pt;border-left:solid white 1.0pt;border-bottom:none;border-right:solid #8E2344 2.25pt;padding:5.0pt 5.0pt 5.0pt 5.0pt;height:121.6pt">
<p class="MsoNormal" align="center" style="text-align:center"><!--[if gte vml 1]><v:shapetype id="_x0000_t75" coordsize="21600,21600" o:spt="75" o:preferrelative="t" path="m@4@5l@4@11@9@11@9@5xe" filled="f" stroked="f">
<v:stroke joinstyle="miter" />
<v:formulas>
<v:f eqn="if lineDrawn pixelLineWidth 0" />
<v:f eqn="sum @0 1 0" />
<v:f eqn="sum 0 0 @1" />
<v:f eqn="prod @2 1 2" />
<v:f eqn="prod @3 21600 pixelWidth" />
<v:f eqn="prod @3 21600 pixelHeight" />
<v:f eqn="sum @0 0 1" />
<v:f eqn="prod @6 1 2" />
<v:f eqn="prod @7 21600 pixelWidth" />
<v:f eqn="sum @8 21600 0" />
<v:f eqn="prod @7 21600 pixelHeight" />
<v:f eqn="sum @10 21600 0" />
</v:formulas>
<v:path o:extrusionok="f" gradientshapeok="t" o:connecttype="rect" />
<o:lock v:ext="edit" aspectratio="t" />
</v:shapetype><v:shape id="Picture_x0020_1" o:spid="_x0000_s1026" type="#_x0000_t75" alt="https://lh3.googleusercontent.com/3gxBE6Mm8gBLDWNyGJ7NVh9wFwqwXAlRqL0nuGZAb3uJ6bbSQq5-vAhqwFckaTXUZRvUB1O7SSMYsX-mEs204URBx0yCSKWJdVQBFt7aWOtMyvFBWukZaptxWL9W8O-EZlyftimd" style='position:absolute;left:0;text-align:left;margin-left:8.3pt;margin-top:2.4pt;width:115.8pt;height:120.1pt;z-index:251659264;visibility:visible;mso-wrap-style:square;mso-width-percent:0;mso-height-percent:0;mso-wrap-distance-left:9pt;mso-wrap-distance-top:0;mso-wrap-distance-right:9pt;mso-wrap-distance-bottom:0;mso-position-horizontal:absolute;mso-position-horizontal-relative:text;mso-position-vertical:absolute;mso-position-vertical-relative:text;mso-width-percent:0;mso-height-percent:0;mso-width-relative:margin;mso-height-relative:margin'>
<v:imagedata src="cid:image001.jpg@01D705D2.A3036A20" o:title="3gxBE6Mm8gBLDWNyGJ7NVh9wFwqwXAlRqL0nuGZAb3uJ6bbSQq5-vAhqwFckaTXUZRvUB1O7SSMYsX-mEs204URBx0yCSKWJdVQBFt7aWOtMyvFBWukZaptxWL9W8O-EZlyftimd" />
<w:wrap type="square"/>
</v:shape><![endif]--><![if !vml]><img width="154" height="160" style="width:1.6083in;height:1.6666in" src="cid:image003.jpg@01D705D2.A30A9610" align="left" hspace="12" alt="https://lh3.googleusercontent.com/3gxBE6Mm8gBLDWNyGJ7NVh9wFwqwXAlRqL0nuGZAb3uJ6bbSQq5-vAhqwFckaTXUZRvUB1O7SSMYsX-mEs204URBx0yCSKWJdVQBFt7aWOtMyvFBWukZaptxWL9W8O-EZlyftimd" v:shapes="Picture_x0020_1"><![endif]><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
</td>
<td width="264" valign="top" style="width:197.75pt;border-top:solid white 1.0pt;border-left:none;border-bottom:none;border-right:solid white 1.0pt;padding:5.0pt 5.0pt 5.0pt 5.0pt;height:121.6pt">
<p class="MsoNormal" style="line-height:150%"><span style="font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Jane Fitzpatrick</span><span style="font-size:10.0pt;line-height:150%;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">,
PhD</span><span style="color:#1F497D;mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:150%"><span style="font-size:10.0pt;line-height:150%;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Chief Operating Officer, ANFF</span><span style="font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">
</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Tel: +61 7 334 69360</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Mob: +61 439 778 766</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal" style="line-height:200%"><span style="font-size:10.0pt;line-height:200%;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Web:</span><span style="mso-fareast-language:EN-US"><a href="http://www.anff.org.au/"><span style="font-size:10.0pt;line-height:200%;font-family:"Arial",sans-serif;color:#1F497D">
</span><span style="font-size:10.0pt;line-height:200%;font-family:"Arial",sans-serif;color:#1155CC">www.anff.org.au</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Australian National Fabrication Facility</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">CAI, Building 57</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Research Road</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">UQ, St Lucia, QLD 4072
</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
</td>
<td style="border:none;padding:0cm 0cm 0cm 0cm" width="0">
<p class="MsoNormal"> </p>
</td>
</tr>
<tr style="height:21.0pt">
<td width="443" colspan="3" valign="top" style="width:332.3pt;padding:5.0pt 5.0pt 5.0pt 5.0pt;height:21.0pt">
<p class="MsoNormal"><span style="font-size:7.5pt;font-family:"Arial",sans-serif;color:#1F497D;mso-fareast-language:EN-US">This email (and any attachments) is intended for the addressee named and may contain privileged/confidential information. If you are not
the intended recipient, please notify the sender and delete the message and attachments immediately and be advised that its use, disclosure or copying is unauthorised. The views expressed, unless you are otherwise advised, are those of the sender and not necessarily
the views of the ANFF Ltd.</span><span style="mso-fareast-language:EN-US"><o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<p class="MsoNormal"><span style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>James C. Sturm<br>
<b>Sent:</b> Thursday, 18 February 2021 4:17 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] On-line teaching reference for simple microfabrication<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">I’m looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.
<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:54.0pt;text-indent:-36.0pt;mso-list:l0 level1 lfo2">
<![if !supportLists]><span lang="EN-US"><span style="mso-list:Ignore">i.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US">How you can use photolithography to pattern a selective etch, or for liftoff,<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:54.0pt;text-indent:-36.0pt;mso-list:l0 level1 lfo2">
<![if !supportLists]><span lang="EN-US"><span style="mso-list:Ignore">ii.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US">Some figures and qualitative description of some different thin film formation or deposition methods<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-left:54.0pt;text-indent:-36.0pt;mso-list:l0 level1 lfo2">
<![if !supportLists]><span lang="EN-US"><span style="mso-list:Ignore">iii.<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span lang="EN-US"> A few simple integrated processes to make a device of some sort.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">I’m sure they are out there.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Thanks, Jim Sturm<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
</div>
</body>
</html>