<div dir="ltr">We have a bunch of these materials in our <a href="https://nanolab.berkeley.edu/public/manuals/equipment_manual.shtml">Equipment manual</a>.<div><br></div><div>Look for any link with the word "class". There are slides as well as videos.</div><div><br></div><div>Lithoclass: <a href="https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8">https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8</a></div><div>Evapclass: <a href="https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit">https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit</a></div><div>Etchclass: <a href="https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit">https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit</a></div><div><br></div><div>-Allison</div><div><br></div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Feb 17, 2021 at 12:43 PM James C. Sturm <<a href="mailto:sturm@princeton.edu">sturm@princeton.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">





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<p class="MsoNormal">I’m looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.  
<u></u><u></u></p>
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<u></u><span>i.<span style="font:7pt "Times New Roman"">                    
</span></span><u></u>How you can use photolithography to pattern a selective etch, or for liftoff,<u></u><u></u></p>
<p class="gmail-m_1554005395523084915MsoListParagraph" style="margin-left:0.75in">
<u></u><span>ii.<span style="font:7pt "Times New Roman"">                  
</span></span><u></u>Some figures and qualitative description of some different thin film formation or deposition methods<u></u><u></u></p>
<p class="gmail-m_1554005395523084915MsoListParagraph" style="margin-left:0.75in">
<u></u><span>iii.<span style="font:7pt "Times New Roman"">                
</span></span><u></u> A few simple integrated processes to make a device of some sort.<u></u><u></u></p>
<p class="MsoNormal">I’m sure they are out there.<u></u><u></u></p>
<p class="MsoNormal">Thanks, Jim Sturm<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div dir="ltr"><div dir="ltr">Allison Dove<br>Process Engineer<br>Marvell Nanofabrication Laboratory<br>UC Berkeley<br><div><a href="mailto:adove@berkeley.edu" target="_blank">adove@berkeley.edu</a></div><div>Pronouns: she/her</div></div></div></div></div></div></div>