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<p class="MsoNormal">Thanks Rick for kind reply. I found Williams reference. Found KOH, 5:1 BHF, and CR-7 will not attack Mo, but no way to find out if they will etch IGZO.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am still curious if anyone has or used Kanto IGZO etchant. Even better if there is a compatibility chart.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"> Chong<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b>From:</b> Morrison, Richard H., Jr <rmorrison@draper.com>
<br>
<b>Sent:</b> Wednesday, February 17, 2021 1:44 PM<br>
<b>To:</b> Chong Lee <chonglee@mit.edu>; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: Kanto Chemical BOSE IGZO etchant<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Get the SDS of the etchant and see what the etch is made out of.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Then there are on line chemical compatibility charts and see what etches the metals of interest.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Good resource is the CRC Physics and Chemistry handbook and back in the late 1990 there was a paper published by Berkeley that listed etch rates for a tone of semiconductor material, I think the author was Kirt
Williams? It was a 2 part article.</span><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Richard H. Morrison<o:p></o:p></p>
<p class="MsoNormal">Principal Member of the Technical Staff<o:p></o:p></p>
<p class="MsoNormal">Draper<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge, MA<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Work 617-258-3420<o:p></o:p></p>
<p class="MsoNormal">Cell 508-930-3461<o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> <a href="mailto:labnetwork-bounces@mtl.mit.edu">
labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Chong Lee<br>
<b>Sent:</b> Wednesday, February 17, 2021 11:54 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Kanto Chemical BOSE IGZO etchant<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am new to this email list, let me know if this is appropriate to ask:<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone know if above etchant will attack common metals like Al and Mo? Where would I look for data or compatibility chart?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Has anyone used it at MTL before?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"> Chong<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to
this email and immediately destroy all copies of this email. <o:p></o:p></p>
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