<html dir="ltr"><head></head><body style="text-align:left; direction:ltr;"><div>MKS wrote "MKS Instruments Handbook Semiconductor Devices and Process Technology" which is a good overview of everything.</div><div>I think you can download the PDF from their website still , or else you could send an email to the Office of the CTO.</div><div><br></div><div><br></div><div><pre style="font-family: monospace; caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0);">-- <br></pre><p style="white-space: normal; caret-color: rgb(0, 0, 0); color: rgb(0, 0, 0); font-family: Roboto, Arial, Helvetica, sans-serif;"><img src="https://www.fabsurplus.com/graphics/logo20.gif" alt="SDI Fabsurplus 20 years" style="border: none;"><br><span style="font-size: medium; color: rgb(4, 125, 21);">Yours Sincerely,<br><br><strong>SDI Fabsurplus LLC</strong></span><br><strong>Stephen Howe</strong><br>Company Owner<br>email: <a href="mailto:info@fabsurplus.com"><span style="color: rgb(4, 125, 21);">info@fabsurplus.com</span></a><br>Mobile: +1 830-388-1071<br>Skype: <span style="color: rgb(4, 125, 21);">stephencshowe</span><br><a href="https://www.fabsurplus.com/"><strong><span style="color: rgb(0, 0, 255);">WWW.FABSURPLUS.COM</span></strong></a><br>Linkedin: <a href="https://www.linkedin.com/company/sdi-fabsurplus"><span style="color: rgb(4, 125, 21);">https://www.linkedin.com/company/sdi-fabsurplus</span></a><br>Twitter: <a href="https://twitter.com/fabsurplus"><span style="color: rgb(4, 125, 21);">https://twitter.com/fabsurplus</span></a><br>Instagram: <a href="https://www.instagram.com/fabsurplus/"><span style="color: rgb(4, 125, 21);">www.instagram.com/fabsurplus</span></a><br>Facebook:<span style="color: rgb(4, 125, 21);"><a href="https://www.facebook.com/fabsurplus">www.facebook.com/fabsurplus</a></span></p><div><br></div></div><div>On Wed, 2021-02-17 at 17:51 -0500, Orad Reshef wrote:</div><blockquote type="cite" style="margin:0 0 0 .8ex; border-left:2px #729fcf solid;padding-left:1ex"><div dir="auto">Hey Jim,</div><div dir="auto"><br></div><div dir="auto">I drafted a helpful intro chapter that I share with my students. Maybe this can be helpful to you:</div><div dir="auto"><div><a href="http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf">http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf</a></div><br></div><div dir="auto">Best,</div><div dir="auto">Orad</div><div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Wed, Feb 17, 2021 at 5:19 PM James C. Sturm <<a href="mailto:sturm@princeton.edu">sturm@princeton.edu</a>> wrote:<br></div><blockquote type="cite" style="margin:0 0 0 .8ex; border-left:2px #729fcf solid;padding-left:1ex">
<div lang="EN-US" link="#0563C1" vlink="#954F72">
<div class="m_7470672170220855240WordSection1">
<p class="MsoNormal">I’m looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.
<u></u><u></u></p>
<p class="m_7470672170220855240MsoListParagraph" style="margin-left:0.75in">
<u></u><span>i.<span style="font-style:normal;font-variant-caps:normal;font-weight:normal;font-stretch:normal;font-size:7pt;line-height:normal;font-family:"Times New Roman"">
</span></span><u></u>How you can use photolithography to pattern a selective etch, or for liftoff,<u></u><u></u></p>
<p class="m_7470672170220855240MsoListParagraph" style="margin-left:0.75in">
<u></u><span>ii.<span style="font-style:normal;font-variant-caps:normal;font-weight:normal;font-stretch:normal;font-size:7pt;line-height:normal;font-family:"Times New Roman"">
</span></span><u></u>Some figures and qualitative description of some different thin film formation or deposition methods<u></u><u></u></p>
<p class="m_7470672170220855240MsoListParagraph" style="margin-left:0.75in">
<u></u><span>iii.<span style="font-style:normal;font-variant-caps:normal;font-weight:normal;font-stretch:normal;font-size:7pt;line-height:normal;font-family:"Times New Roman"">
</span></span><u></u> A few simple integrated processes to make a device of some sort.<u></u><u></u></p>
<p class="MsoNormal">I’m sure they are out there.<u></u><u></u></p>
<p class="MsoNormal">Thanks, Jim Sturm<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
</div>
</div>
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</blockquote></div></div>-- <br><div dir="ltr" class="gmail_signature" data-smartmail="gmail_signature"><div dir="ltr"><div dir="ltr"><div dir="ltr">Orad Reshef, PhD</div><div dir="ltr"><br>Département de physique | Department of Physics<br>Université d’Ottawa | University of Ottawa<br><a href="http://boydnlo.ca" target="_blank">boydnlo.ca</a> | <a href="http://reshef.ca" target="_blank">reshef.ca</a><br></div></div></div></div>
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