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<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US">Hello Mario,<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US">Same issue here in Sherbrooke. We plan to purchase a replacement for our furnace in the coming years so I’ve started my search and had some fruitful discussions with these guys : exper-tech.com,
Barrie VanDevender <<a href="mailto:bvd@exper-tech.com">bvd@exper-tech.com</a>>. You could consider the compact models. I’m curious of what these small footprint systems can achieve.
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-CA" style="mso-fareast-language:EN-US">Best regards,<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Étienne Grondin<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Coordonnateur de laboratoire<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">3IT Université de Sherbrooke<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="mailto:e.grondin@usherbrooke.ca"><span style="color:#0563C1">e.grondin@usherbrooke.ca</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">(819) 821-8000 poste 61941</span><o:p></o:p></p>
<p class="MsoNormal"><a href="https://www.usherbrooke.ca/3it/fr/"><span style="color:windowtext;text-decoration:none"><img border="0" width="202" height="110" style="width:2.1083in;height:1.15in" id="Image_x0020_2" src="cid:image003.jpg@01D70995.D3C7E930"></span></a><o:p></o:p></p>
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<p class="MsoNormal"><b><span lang="FR">De :</span></b><span lang="FR"> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu>
<b>De la part de</b> Beaudoin, Mario<br>
<b>Envoyé :</b> 22 février 2021 18:46<br>
<b>À :</b> labnetwork@mtl.mit.edu<br>
<b>Cc :</b> Gou, Steven <steven.gou@ubc.ca><br>
<b>Objet :</b> [labnetwork] Recommendation for small footprint LPCVD system?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p><span lang="EN-CA">Dear Labnetwork experts,<o:p></o:p></span></p>
<p><span lang="EN-CA">We're looking to purchase an LPCVD system to deposit SiN and SiO2 for silicon photonics. We have low volumes but occasionally need to deposit on 200mm wafers. Ideally, we would prefer a vertical system that only needs to accommodate
one 200 mm wafer on occasion while most of the work will be on multiple smaller samples (eg 25x25mm).<o:p></o:p></span></p>
<p><span lang="EN-CA">Any suggestions or recommendations are welcomed.<o:p></o:p></span></p>
<p>Mario<o:p></o:p></p>
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