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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link="#0563C1" vlink="#954F72" style='word-wrap:break-word'><div class=WordSection1><p class=MsoNormal>Hi Mario,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Please have a look at <a href="http://www.tystar.com">www.tystar.com</a> . We have a few different methods of depositing SiO2 and Si3N4 on 200mm wafers, LPCVD and Photo Enhanced CVD. If you have any questions please let me know. Thanks<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='color:#1F497D'>Best Regards,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Jim Smith<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Business Development Mgr.<o:p></o:p></span></p><p class=MsoNormal><b><i><span style='color:#1F497D'>Tystar Corporation<o:p></o:p></span></i></b></p><p class=MsoNormal><span style='color:#1F497D'>7050 Lampson Ave.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Garden Grove, Calif. 92841<o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D'>(</span></b><b><span style='color:#1F497D'> Office: 310-781-9219 ext 216 <o:p></o:p></span></b></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D'>(</span></b><b><span style='color:#1F497D'> Cell: 310-618-4018<o:p></o:p></span></b></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D'>(</span></b><b><span style='color:#1F497D'> Fax: 310-781-9438<o:p></o:p></span></b></p><p class=MsoNormal><b><span style='font-size:13.0pt;font-family:Wingdings;color:#1F497D'>*</span></b><b><span style='color:#1F497D'> </span></b><a href="mailto:jsmith@tystar.com"><b><span style='color:#0563C1'>jsmith@tystar.com</span></b></a><b><span style='color:#1F497D'><o:p></o:p></span></b></p><p class=MsoNormal><a href="http://www.tystar.com/"><b><span style='color:#0563C1'>http://www.tystar.com</span></b></a><b><span style='color:#1F497D'><o:p></o:p></span></b></p><p class=MsoNormal><b><span style='color:#1F497D'><o:p> </o:p></span></b></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-family:"Verdana",sans-serif;color:gray'>This Document is confidential and it is intended only for the addressee(s). Any review, dissemination, distribution, or copying of this message by persons or entities other than the intended recipient is strictly prohibited. <o:p></o:p></span></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><div><div style='border:none;border-top:solid #E1E1E1 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b>From:</b> labnetwork-bounces@mtl.mit.edu <labnetwork-bounces@mtl.mit.edu> <b>On Behalf Of </b>Beaudoin, Mario<br><b>Sent:</b> Monday, February 22, 2021 3:46 PM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Cc:</b> Gou, Steven <steven.gou@ubc.ca><br><b>Subject:</b> [labnetwork] Recommendation for small footprint LPCVD system?<o:p></o:p></p></div></div><p class=MsoNormal><o:p> </o:p></p><p>Dear Labnetwork experts,<o:p></o:p></p><p>We're looking to purchase an LPCVD system to deposit SiN and SiO2 for silicon photonics. We have low volumes but occasionally need to deposit on 200mm wafers. Ideally, we would prefer a vertical system that only needs to accommodate one 200 mm wafer on occasion while most of the work will be on multiple smaller samples (eg 25x25mm).<o:p></o:p></p><p>Any suggestions or recommendations are welcomed.<o:p></o:p></p><p>Mario<o:p></o:p></p><div><p class=MsoNormal>-- <br><img border=0 width=340 height=204 style='width:3.5416in;height:2.125in' id="Picture_x0020_1" src="cid:image001.jpg@01D709C4.1C97CF30"><o:p></o:p></p></div></div></body></html>