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Our SPTS Pegasus uses <span style="color: rgba(0, 0, 0, 0.85); font-family: "Helvetica Neue";" class="">Galden HT135 in an SMC HRZ chiller for platen cooling.</span>
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<div class=""><font face="Helvetica Neue" class=""><span style="caret-color: rgba(0, 0, 0, 0.85); color: rgba(0, 0, 0, 0.85);" class="">Jim</span></font></div>
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<div class=""><font face="Helvetica Neue" class=""><span style="caret-color: rgba(0, 0, 0, 0.85); color: rgba(0, 0, 0, 0.85);" class="">Jim Beall</span></font></div>
<div class=""><font face="Helvetica Neue" class=""><span style="caret-color: rgba(0, 0, 0, 0.85); color: rgba(0, 0, 0, 0.85);" class="">NIST Boulder Microfabrication Facility<br class="">
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<div class="">On Apr 2, 2021, at 1:01 PM, Patrick Roman <<a href="mailto:proma016@fiu.edu" class="">proma016@fiu.edu</a>> wrote:</div>
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<div class="">Greetings! Our Drie system uses a chiller with distilled water for<br class="">
the chuck cooling. Can anyone recommend a better cooling fluid for 5C<br class="">
processes, eg silicon etching?<br class="">
<br class="">
Patrick Roman<br class="">
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