<div dir="ltr">Pretty much all of our RIE tools run Fluorinert (FC-3283, or the Galden equivalent). You'll want a chiller that is designed to run that fluid though, and furthermore I would strongly recommend against putting it in any chiller that previously had water in it (they do not mix). That said, I think that's a pretty common fluid at least for electrostatic chucks, and works well down to -20C.<div><br></div><div>-Kevin</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Mon, Apr 5, 2021 at 12:10 PM Bruce Tolleson <<a href="mailto:betemc@rit.edu">betemc@rit.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Dear Labnetwork,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external D.I. cartridge to keep the conductivity low. It works well for us.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Thank you,<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u> <u></u></span></p>
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<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Bruce E. Tolleson<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Rochester Institute of Technology<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">82 Lomb Memorial Drive, Bldg 17-2627<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">Rochester, NY 14623-5604<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)">(585) 478-3836<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11pt;font-family:Calibri,sans-serif;color:navy"><img width="90" height="60" style="width: 0.9375in; height: 0.625in;" id="gmail-m_-2030732001168192838Picture_x0020_1" src="cid:178a3d2e56a4ce8e91" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="font-size:11pt;font-family:Calibri,sans-serif;color:rgb(31,73,125)"><u></u><u></u></span></p>
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<p class="MsoNormal"><b><span style="font-size:11pt;font-family:Calibri,sans-serif">From:</span></b><span style="font-size:11pt;font-family:Calibri,sans-serif"> labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu" target="_blank">labnetwork-bounces@mtl.mit.edu</a>>
<b>On Behalf Of </b>Beall, James A. (Fed)<br>
<b>Sent:</b> Friday, April 2, 2021 3:54 PM<br>
<b>To:</b> Patrick Roman <<a href="mailto:proma016@fiu.edu" target="_blank">proma016@fiu.edu</a>><br>
<b>Cc:</b> <a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] STS ASE DRIE chiller<u></u><u></u></span></p>
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<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Our SPTS Pegasus uses <span style="font-family:"Helvetica Neue",serif">Galden HT135 in an SMC HRZ chiller for platen cooling.</span>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">Jim</span><u></u><u></u></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">Jim Beall</span><u></u><u></u></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">NIST Boulder Microfabrication Facility<br>
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<p class="MsoNormal">On Apr 2, 2021, at 1:01 PM, Patrick Roman <<a href="mailto:proma016@fiu.edu" target="_blank">proma016@fiu.edu</a>> wrote:<u></u><u></u></p>
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<p class="MsoNormal">Greetings! Our Drie system uses a chiller with distilled water for<br>
the chuck cooling. Can anyone recommend a better cooling fluid for 5C<br>
processes, eg silicon etching?<br>
<br>
Patrick Roman<br>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div>Kevin Owen<div>Lead Research Engineer</div><div>Operations Group, Lurie Nanofabrication Facility</div><div>University of Michigan</div><div>(734) 545-4014</div></div></div></div></div></div></div></div>