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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Dear Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Our STS ASE uses an Affinity RWA-12T-CE55CBD4 chiller with an external D.I. cartridge to keep the conductivity low. It works well for us.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thank you,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Bruce E. Tolleson<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">82 Lomb Memorial Drive, Bldg 17-2627<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">(585) 478-3836<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:navy"><img width="90" height="60" style="width:.9375in;height:.625in" id="Picture_x0020_1" src="cid:image001.jpg@01D729F2.14123140" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Beall, James A. (Fed)<br>
<b>Sent:</b> Friday, April 2, 2021 3:54 PM<br>
<b>To:</b> Patrick Roman <proma016@fiu.edu><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] STS ASE DRIE chiller<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Our SPTS Pegasus uses <span style="font-family:"Helvetica Neue",serif">Galden HT135 in an SMC HRZ chiller for platen cooling.</span>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">Jim</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">Jim Beall</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-family:"Helvetica Neue",serif">NIST Boulder Microfabrication Facility<br>
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<p class="MsoNormal">On Apr 2, 2021, at 1:01 PM, Patrick Roman <<a href="mailto:proma016@fiu.edu">proma016@fiu.edu</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Greetings! Our Drie system uses a chiller with distilled water for<br>
the chuck cooling. Can anyone recommend a better cooling fluid for 5C<br>
processes, eg silicon etching?<br>
<br>
Patrick Roman<br>
<br>
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