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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Bill,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">We had a similar story with our PlasmaLab 100, some years ago.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The system came originally equipped with an Adixen Pump with roots blower, I think similar to the Leybold pump you mentioned. The pump worked fine, but every
four years we had to send it to be refurbished in France, an expensive process (money and also time).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">I decided to exchange the Adixen pump for an equivalent Edwards, since we have local service at affordable prices here in Israel.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Our PlasmaLab system sends START/STOP and STAND-BY commands to the pump<a name="_MailEndCompose">. Those are simple dry-contacts commands, but the technician
from Edwards didn’t succeeded to make the connection. Then I came into the scene and with patience I made it work.<o:p></o:p></a></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Since we have Edwards service available here near us, we programed the pump to “run to fail” and when the time comes we will send it for complete refurbishing,
what will take one week to be done. I think it is a good arrangement. Much less expensive than the original situation and also faster.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Original Adixen Pump Model: ADS 602P<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Edwards Pump model: IH600<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Attached: PlasmaLab 100 Rough Pump Connections Schematics<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Exchange Date: 02/2016 – five years and running!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shimon Eliav<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The Hebrew University of Jerusalem<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D">The Unit for Nano Fabrication<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Jerusalem - ISRAEL</span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Bill Kiether<br>
<b>Sent:</b> Friday, 23 April 2021 21:03<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> Jon Lewis <jlewis@classone.com>; Philip Barletta <pbarlet@ncsu.edu><br>
<b>Subject:</b> [labnetwork] Replacement for Leybold Dryvac 50P?<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Hello, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">We have a Leybold Dryvac 50P dry pump (model 13833) with a Roots Blower on our Oxford PlasmaLab 80+ PECVD/RIE tool that has met it's final days. Has anyone recently had one of these models refurbished (i.e. do you have a good vendor? )
I have reached out to Leybold and a handful of vacuum pump repair shops, but no luck so far.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Alternatively, has anyone successfully upgraded to a newer pumping stack on this PECVD tool? What was your experience?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Bill Kiether<o:p></o:p></p>
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<p class="MsoNormal">Sr. Research Engineer<o:p></o:p></p>
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<p class="MsoNormal">NCSU Nanofabrication Facility<o:p></o:p></p>
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<p class="MsoNormal"><a href="mailto:wjkiethe@ncsu.edu">wjkiethe@ncsu.edu</a><o:p></o:p></p>
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