<div dir="ltr"><div>Chang,</div><div><br></div>I've found ZEP is way more stable when used as a plasma etch mask; I swear PMMA etches if you look at it cross-eyed... I don't typically handle the ZEP myself, but I am pretty sure the bottle we keep in the fridge (gotta keep it in the fridge) has lasted quite a long time.<div><br></div><div>-Kevin</div></div><br><div class="gmail_quote"><div dir="ltr" class="gmail_attr">On Thu, Apr 29, 2021 at 11:48 AM Chang, Long <<a href="mailto:lvchang@central.uh.edu">lvchang@central.uh.edu</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">
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Hi Guys,
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<div>I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?</div>
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<div>Thanks,<br>
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Long</div>
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</blockquote></div><br clear="all"><div><br></div>-- <br><div dir="ltr" class="gmail_signature"><div dir="ltr"><div><div dir="ltr"><div><div dir="ltr"><div>Kevin Owen<div>Lead Research Engineer</div><div>Operations Group, Lurie Nanofabrication Facility</div><div>University of Michigan</div><div>(734) 545-4014</div></div></div></div></div></div></div></div>