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Thanks Everyone. It’s clear what I should do.
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Long</div>
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<div class="">On Apr 30, 2021, at 6:08 AM, Lapointe, Jean <<a href="mailto:Jean.Lapointe@nrc-cnrc.gc.ca" class="">Jean.Lapointe@nrc-cnrc.gc.ca</a>> wrote:</div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Hi Long,<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It does last for years, about the same as PMMA as far as I can tell. We just finished a bottle with a 2016 expiry and saw no change after opening a new bottle.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It was stored at room T.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It can withstands plasma etching much better than PMMA but doesn’t have as good an adhesion to semiconductors. So it is not a good mask for wet etching semiconductors.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It works very well for lift-off.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It is expensive but can easily be diluted to get thinner films.<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">It can also be developed in N-amyl acetate; much safer than xylene and with the same contrast and dose-to-clear. <o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class="">Jean<o:p class=""></o:p></span></div>
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<span style="font-size: 11pt; font-family: Calibri, sans-serif; color: rgb(31, 73, 125);" class=""><o:p class=""> </o:p></span></div>
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<b class=""><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif;" class="">From:</span></b><span lang="EN-US" style="font-size: 11pt; font-family: Calibri, sans-serif;" class=""><span class="Apple-converted-space"> </span>labnetwork
[<a href="mailto:labnetwork-bounces@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">mailto:labnetwork-bounces@mtl.mit.edu</a>]<span class="Apple-converted-space"> </span><b class="">On Behalf Of<span class="Apple-converted-space"> </span></b>Chang,
Long<br class="">
<b class="">Sent:</b><span class="Apple-converted-space"> </span>April 29, 2021 10:29 AM<br class="">
<b class="">To:</b><span class="Apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu" style="color: rgb(149, 79, 114); text-decoration: underline;" class="">labnetwork@mtl.mit.edu</a><br class="">
<b class="">Subject:</b><span class="Apple-converted-space"> </span>[labnetwork] ZEP worth it?<o:p class=""></o:p></span></div>
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<o:p class=""> </o:p></div>
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<em class=""><span style="color: red;" class="">***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'extérieur du CNRC</span></em><o:p class=""></o:p></p>
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Hi Guys,<span class="Apple-converted-space"> </span><o:p class=""></o:p></div>
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<o:p class=""> </o:p></div>
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I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?<o:p class=""></o:p></div>
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<o:p class=""> </o:p></div>
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Thanks,<o:p class=""></o:p></div>
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<span style="" class="">Long</span></div>
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