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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Dear Long,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Thanks for originating this discussion. It was nice to learn from the experience of several people. I think it is very useful and I did a summary of the replies,
please find attached.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Shimon<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hebrew University of Jerusalem<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:9.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Israel<o:p></o:p></span></p>
<p class="MsoNormal"><a name="_MailEndCompose"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"><o:p> </o:p></span></a></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> Friday, 30 April 2021 18:29<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] ZEP worth it?<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks Everyone. It’s clear what I should do. <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="color:black">Long<o:p></o:p></span></p>
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<p class="MsoNormal">On Apr 30, 2021, at 6:08 AM, Lapointe, Jean <<a href="mailto:Jean.Lapointe@nrc-cnrc.gc.ca">Jean.Lapointe@nrc-cnrc.gc.ca</a>> wrote:<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Hi Long,</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It does last for years, about the same as PMMA as far as I can tell. We just finished a bottle with a 2016 expiry and saw no change after opening a new bottle.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It was stored at room T.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It can withstands plasma etching much better than PMMA but doesn’t have as good an adhesion to semiconductors. So it is not a good mask for wet etching semiconductors.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It works very well for lift-off.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It is expensive but can easily be diluted to get thinner films.</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">It can also be developed in N-amyl acetate; much safer than xylene and with the same contrast and dose-to-clear. </span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D">Jean</span><o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D"> </span><o:p></o:p></p>
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<p class="MsoNormal"><b><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span class="apple-converted-space"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif"> </span></span><span style="font-size:11.0pt;font-family:"Calibri",sans-serif">labnetwork
[<a href="mailto:labnetwork-bounces@mtl.mit.edu"><span style="color:#954F72">mailto:labnetwork-bounces@mtl.mit.edu</span></a>]<span class="apple-converted-space"> </span><b>On Behalf Of<span class="apple-converted-space"> </span></b>Chang, Long<br>
<b>Sent:</b><span class="apple-converted-space"> </span>April 29, 2021 10:29 AM<br>
<b>To:</b><span class="apple-converted-space"> </span><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:#954F72">labnetwork@mtl.mit.edu</span></a><br>
<b>Subject:</b><span class="apple-converted-space"> </span>[labnetwork] ZEP worth it?</span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><em><span style="color:red">***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'extérieur du CNRC</span></em><o:p></o:p></p>
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<p class="MsoNormal">Hi Guys,<span class="apple-converted-space"> </span><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">I have no experience with ZEP, but the data sheet suggest a critical dose of ~35 uC/cm2, approximately 1/10 of PMMA. What are the problems with ZEP and under what conditions is it worth the cost? Does it last forever in storage like PMMA?<o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal">Long<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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