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w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0cm;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:#0563C1;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:#954F72;
text-decoration:underline;}
p
{mso-style-priority:99;
mso-margin-top-alt:auto;
margin-right:0cm;
mso-margin-bottom-alt:auto;
margin-left:0cm;
font-size:12.0pt;
font-family:"Times New Roman",serif;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri",sans-serif;
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:612.0pt 792.0pt;
margin:72.0pt 72.0pt 72.0pt 72.0pt;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">HI Long,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Also have a look at Dischem’s HSiQ made from the powder. It is cheaper than Dow Corning’s XR-1541 and the lead time is shorter than
2 weeks. <o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">The Dischem HSiQ behaves almost the same as Dow’s but requires different bake conditions and needs to be filtered upon dispensing.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">The Medusa resist has a slightly different composition (not really HSQ) and we had severe adhesion issue to Si. It was only used for
some initial test a few years ago but could not be used to pattern any submicron structures. Someone may have more recent results…<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri",sans-serif;color:#1F497D;mso-fareast-language:EN-US">Jean<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif">From:</span></b><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri",sans-serif"> labnetwork [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Chang, Long<br>
<b>Sent:</b> May 6, 2021 12:27 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] HSQ Alternatives<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p><em><span style="color:red">***ATTENTION*** This email originated from outside of the NRC. ***ATTENTION*** Ce courriel provient de l'extérieur du CNRC</span></em><o:p></o:p></p>
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<p class="MsoNormal">Hi All, <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I’m looking for HSQ alternatives since it’s expensive, has a 14 week lead time and comes in 250mL bottle. We waste most of the bottle due to it’s 6 months shelf life. Although we had some bottles still good after 2 years at 5C, it’s just
a huge gamble after a year. We tried LN2 freezing, but it takes too much effort.<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">I’ve attached a table of the cost per mL for the alternatives I found assuming you want 100nm thick. The AQM and EMResist are in powder form and advertise 1 year powder shelf life and 3 months mixture shelf life. They can distribute the
powder into many small bottles. <o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Particularly interesting is the Medusa 82 which has the lowest cost and advertises better shelf life. Does anyone have experience with these HSQ alternatives?<o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><img width="346" height="119" id="B22AB60B-4D51-4545-A7EB-6C2B9D076D07" src="cid:image001.png@01D742A4.F9863170"><o:p></o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Thanks,<o:p></o:p></p>
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<p class="MsoNormal"><span style="color:black">Long<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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