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<p class="MsoPlainText">Hi Loik,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">One area to make sure you have high purity gas is the gas cabinet purge gas. When you purge your gas cabinet process panel or perform a cylinder change you are introducing nitrogen to displace the chlorine and fluorine chemistries. If
that purge gas isn't completely dry, the trace moisture will react with the acids and start corroding/contaminating your panel. The first place this typically shows up is in the regulators with the inability to hold a setpoint, and the outlet pressure starts
to increase. This happens because the pressure drop is higher through the regulator, and this causes the moisture to fall out and the corrosion starts. If this happens, you can look in the outlet fitting of the regulator and you’ll see the corrosion. Usually
by this time, the panel is in bad shape.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">For these types of gases, when our customers can't guarantee that their nitrogen will be 5 nines, or if there is a chance that the wrong bottle of nitrogen can make its way to the purge panel, we recommend a purge gas purifier to remove
the trace moisture. It will make your panels last a lot longer. Also, if possible, order your gas cabinets with a "trickle purge" on the automated N2 purge inlet valve connected to your process panel as this will keep the nitrogen flowing through the cylinder
connection when you are replacing the process cylinders. This keeps atmosphere from going into the process lines when you remove the spent cylinder. Also, if possible, order your purge cylinders with DISS cylinder connections. It’s very unusual to order general
purpose nitrogen with DISS cylinder fittings and is cheap insurance to assure that the wrong grade of nitrogen doesn't end up connected to your chlorine or fluorine gas cabinets.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hope this helps,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Tom
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Tom Britton<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Director of Sales<o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:14.0pt;font-family:"Century Gothic",sans-serif;color:#323E4F">Critical Systems, Inc.<o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Direct: 208.890.1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Office: 877.572.5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-family:"Century Gothic",sans-serif;color:#323E4F">Skype: tombrittoncsi<o:p></o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:12.0pt;font-family:"Arial Narrow",sans-serif;color:#323E4F"><a href="http://www.criticalsystemsinc.com/"><span style="color:#0563C1">www.CriticalSystemsInc.com</span></a><o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="font-size:4.0pt;font-family:"Arial Narrow",sans-serif;color:#323E4F"><o:p> </o:p></span></i></p>
<p class="MsoNormal"><span style="color:#1F497D"><img border="0" width="196" height="38" style="width:2.0416in;height:.4in" id="Picture_x0020_35" src="cid:image001.png@01D748A7.F9470B40" alt="logo for email signature png"><o:p></o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:4.0pt;font-family:"Century Gothic",sans-serif;color:#002060"><o:p> </o:p></span></b></p>
<p class="MsoNormal"><b><i><span style="font-family:"Century Gothic",sans-serif;color:#002060">Note: 7 days per week Technical Support
<o:p></o:p></span></i></b></p>
<p class="MsoNormal"><i><span style="font-family:"Century Gothic",sans-serif;color:#002060">Phone: 1-888-218-6308<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="font-family:"Century Gothic",sans-serif;color:#002060">Email:
<a href="mailto:Fieldservices@criticalsystemsinc.com"><span style="color:#0563C1">Fieldservices@criticalsystemsinc.com</span></a></span></i><span style="color:#323E4F"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-----Original Message-----<o:p></o:p></p>
<p class="MsoPlainText">From: labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> On Behalf Of Lewis,William<o:p></o:p></p>
<p class="MsoPlainText">Sent: Friday, May 14, 2021 7:41 AM<o:p></o:p></p>
<p class="MsoPlainText">To: Dr. Loïk Gence <<a href="mailto:loik.gence@fis.puc.cl">loik.gence@fis.puc.cl</a>>;
<a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></p>
<p class="MsoPlainText">Subject: Re: [labnetwork] Gas Purity Grade for RIE<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">[EXTERNAL EMAIL] This message originated outside of your organization. Remember to always use caution when opening attachments or clicking on links.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hi Loïk,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Four nines is definitely clean enough for plasma etch processes.....and, I seriously doubt 3 nines would be an issue for most processes. The cost jumps quite a bit from 4 nines to 5 nines. Filtration and purification matters much more
for PVD, PECVD etc...<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-----Original Message-----<o:p></o:p></p>
<p class="MsoPlainText">From: labnetwork <<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>> On Behalf Of Dr. Loïk Gence<o:p></o:p></p>
<p class="MsoPlainText">Sent: Thursday, May 13, 2021 4:16 PM<o:p></o:p></p>
<p class="MsoPlainText">To: <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></p>
<p class="MsoPlainText">Subject: [labnetwork] Gas Purity Grade for RIE<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">[External Email]<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hi All,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I hope you are all fine and safe.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">We are planning the installation of our first RIE with chlorine and Fluorine chemistries.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I was wondering, what are purity grade of the gases you are using.<o:p></o:p></p>
<p class="MsoPlainText">Always electronic grade, 5.0 grade or above ? To avoid potential contamination of the gas lines, chamber, etc... of course, choosing the best purity available is a solution. However, thinking about the cost/utility for standard etching
processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thanks in advance for your comment.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Best,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Loïk<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">--<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Dr. Loïk Gence<o:p></o:p></p>
<p class="MsoPlainText">Assistant Professor<o:p></o:p></p>
<p class="MsoPlainText">Instituto de Física<o:p></o:p></p>
<p class="MsoPlainText">Pontificia Universidad Católica de Chile Avda. Vicuña Mackenna 4860, CP 7820436 Santiago<o:p></o:p></p>
<p class="MsoPlainText">Lab: +56 95504 9648<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
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