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<p>Hi Srinivasa & All, <br>
</p>
<p>The RIE will include a loadloack and is design to work also with
corrosive gases. <br>
</p>
<p>The venting N2 should be at least 4.0. As suggested, I'll check
with the provider all the possibilities to get higher than 4.0.
but for sure, the semiconductor grade gases will be imported.</p>
<p>thanks a lot for your valuable feedback! <br>
</p>
<p><br>
</p>
<p>Best, <br>
</p>
<p>Loïk<br>
</p>
<p><br>
</p>
<p><br>
</p>
<p><br>
</p>
<div class="moz-cite-prefix">Le 14/05/2021 à 11:46, Srinivasa Reddy
a écrit :<br>
</div>
<blockquote type="cite"
cite="mid:CAGZGR9FfrVW5Hsinvt050+4OQzijLxE5z+j1RHBSBGVdm+1bhg@mail.gmail.com">
<meta http-equiv="content-type" content="text/html; charset=UTF-8">
<div dir="ltr">Dear Loik,
<div><br>
<div>Depending upon the application you can choose the purity.<br>
<div>Mostly we are using 5N (99.999%), or 4N5 (99.995)
purity gases.</div>
<div>Linde and Mathison can supply the cylinders (bottles)</div>
<div><br clear="all">
<div>
<div dir="ltr" data-smartmail="gmail_signature">
<div dir="ltr">
<div>
<div dir="ltr">
<div>
<div dir="ltr">
<div>Thanks & Regards</div>
<div>Srinivasa Reddy Kuppireddi<br>
</div>
<div>Project Manager </div>
<div>Center for NEMS & Nano Photonics
(CNNP)</div>
<div>ESB 225, Dept. of Electrical
Engineering</div>
<div>Indian Institute of Technology(IIT)
Madras</div>
<div>Chennai-600036, Indian</div>
<div>+91 44 2257 5493 (O)</div>
<div>+91 789 326 8010(M)</div>
</div>
</div>
</div>
</div>
</div>
</div>
</div>
<br>
</div>
</div>
</div>
</div>
<br>
<div class="gmail_quote">
<div dir="ltr" class="gmail_attr">On Fri, May 14, 2021 at 5:10
AM Dr. Loïk Gence <<a href="mailto:loik.gence@fis.puc.cl"
target="_blank" moz-do-not-send="true">loik.gence@fis.puc.cl</a>>
wrote:<br>
</div>
<blockquote class="gmail_quote" style="margin:0px 0px 0px
0.8ex;border-left:1px solid rgb(204,204,204);padding-left:1ex">Hi
All,<br>
<br>
I hope you are all fine and safe.<br>
<br>
We are planning the installation of our first RIE with
chlorine and <br>
Fluorine chemistries.<br>
<br>
I was wondering, what are purity grade of the gases you are
using. <br>
Always electronic grade, 5.0 grade or above ? To avoid
potential <br>
contamination of the gas lines, chamber, etc... of course,
choosing the <br>
best purity available is a solution. However, thinking about
the <br>
cost/utility for standard etching processes, and with
potential problem <br>
of local availability of high grade, what grade range would
you consider <br>
safe for the equipment and standard processes?<br>
<br>
Thanks in advance for your comment.<br>
<br>
<br>
Best,<br>
<br>
Loïk<br>
<br>
<br>
<br>
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</blockquote>
</div>
</blockquote>
<pre class="moz-signature" cols="72">--
Dr. Loïk Gence
Assistant Professor
Instituto de Física
Pontificia Universidad Católica de Chile
Avda. Vicuña Mackenna 4860,
CP 7820436 Santiago
Lab: +56 95504 9648
</pre>
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