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<p>We are using 5.0 gases for ICP and ECR RIE here at UBC with good
results.</p>
<p>M.<br>
</p>
<div class="moz-cite-prefix">On 2021-05-13 5:52 p.m., Dr. Loïk Gence
wrote:<br>
</div>
<blockquote type="cite"
cite="mid:6965d02e-bea4-5c41-fb32-5721ab2d7e38@fis.puc.cl">[CAUTION:
Non-UBC Email]
<br>
<br>
Hi Keith,
<br>
<br>
Thanks for your comment.
<br>
<br>
that would be great. However, a purifier would represent
additional costs of equipment and maintenance that seems
expensive.
<br>
<br>
We are talking about a small university cleanroom, and this will
be the first RIE in Chile.
<br>
<br>
The matter is mainly for SF6, Cl2, BCl3, CHF3, and CF4. I guess,
purification of BCl3 and Cl2 is not that easy.
<br>
<br>
<br>
Best,
<br>
<br>
Loïk
<br>
<br>
<br>
Le 13/05/2021 à 20:08, Keith Barnes a écrit :
<br>
<blockquote type="cite">Why not use a purifier?
<br>
<br>
Sent from my iPhone
<br>
<br>
<blockquote type="cite">On May 13, 2021, at 4:38 PM, Dr. Loïk
Gence <a class="moz-txt-link-rfc2396E" href="mailto:loik.gence@fis.puc.cl"><loik.gence@fis.puc.cl></a> wrote:
<br>
<br>
Hi All,
<br>
<br>
I hope you are all fine and safe.
<br>
<br>
We are planning the installation of our first RIE with
chlorine and Fluorine chemistries.
<br>
<br>
I was wondering, what are purity grade of the gases you are
using. Always electronic grade, 5.0 grade or above ? To
avoid potential contamination of the gas lines, chamber,
etc... of course, choosing the best purity available is a
solution. However, thinking about the cost/utility for
standard etching processes, and with potential problem of
local availability of high grade, what grade range would you
consider safe for the equipment and standard processes?
<br>
<br>
Thanks in advance for your comment.
<br>
<br>
<br>
Best,
<br>
<br>
Loïk
<br>
<br>
<br>
</blockquote>
</blockquote>
<br>
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