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<p class="MsoPlainText">Hi Loïk,<o:p></o:p></p>
<p class="MsoPlainText">Please see below the list of gases we have installed here at UNF-HUJI. This set-up is running for more than ten years (with periodic cylinder exchanges) providing repeatable results.<o:p></o:p></p>
<p class="MsoPlainText">Regards,<o:p></o:p></p>
<p class="MsoPlainText">Shimon<o:p></o:p></p>
<p class="MsoPlainText"><img width="202" height="484" id="Picture_x0020_1" src="cid:image001.jpg@01D748D3.54CB06D0"><o:p></o:p></p>
<p class="MsoPlainText"><a name="_MailEndCompose"><o:p> </o:p></a></p>
<p class="MsoPlainText">-----Original Message-----<br>
From: labnetwork [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of Dr. Loïk Gence<br>
Sent: Thursday, 13 May 2021 23:16<br>
To: labnetwork@mtl.mit.edu<br>
Subject: [labnetwork] Gas Purity Grade for RIE</p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Hi All,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I hope you are all fine and safe.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">We are planning the installation of our first RIE with chlorine and Fluorine chemistries.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I was wondering, what are purity grade of the gases you are using. Always electronic grade, 5.0 grade or above ? To avoid potential contamination of the gas lines, chamber, etc... of course, choosing the best purity available is a
solution. However, thinking about the cost/utility for standard etching processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Thanks in advance for your comment.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Best,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Loïk<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">-- <o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Dr. Loïk Gence<o:p></o:p></p>
<p class="MsoPlainText">Assistant Professor<o:p></o:p></p>
<p class="MsoPlainText">Instituto de Física<o:p></o:p></p>
<p class="MsoPlainText">Pontificia Universidad Católica de Chile Avda. Vicuña Mackenna 4860, CP 7820436 Santiago<o:p></o:p></p>
<p class="MsoPlainText">Lab: +56 95504 9648<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">_______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText"><a href="mailto:labnetwork@mtl.mit.edu"><span style="color:windowtext;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork"><span style="color:windowtext;text-decoration:none">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
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