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Here at Argonne, we use an ADT dicing saw with a resin blade with 46 micron grit</div>
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.8mm/s</div>
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slices of 100-150 microns</div>
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Yours</div>
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<div id="divRplyFwdMsg" dir="ltr"><font face="Calibri, sans-serif" color="#000000" style="font-size:11pt"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> on behalf of Ahdam Ali <aali@eng.ucsd.edu><br>
<b>Sent:</b> Monday, May 17, 2021 8:42 PM<br>
<b>To:</b> Gloria Qiu <gloria.qiu@sydney.edu.au><br>
<b>Cc:</b> labnetwork@mtl.mit.edu <labnetwork@mtl.mit.edu><br>
<b>Subject:</b> Re: [labnetwork] Sapphire dicing</font>
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<div dir="ltr">Gloria and Natalia,
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<div>I’ll write up a procedure and include consumables/parts. Discussions with a professional dicing service has taught me that it’s possible to dice sapphire with a single pass up to 1mm, but they dress very heavily for each sample (removing 20% of the samples
thickness from the blade) and even they blow up blades. It’s quite a difficult material to dice. Depth steps seem to the most viable route.</div>
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<div>Best,</div>
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<div dir="ltr"><span style="background-color:rgba(255,255,255,0)">Ahdam Ali</span>
<div style="font-variant-ligatures:normal; font-variant-east-asian:normal"><span style="background-color:rgba(255,255,255,0)">R&D Engineer II</span></div>
<div style="font-variant-ligatures:normal; font-variant-east-asian:normal"><span style="background-color:rgba(255,255,255,0)">UCSD Calit2 Nano3 Facility</span></div>
<div style="font-variant-ligatures:normal; font-variant-east-asian:normal"><span style="background-color:rgba(255,255,255,0)">Atkinson Hall M/C0436</span></div>
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<span style="background-color:rgba(255,255,255,0)">E<font style="font-stretch:normal; line-height:19.99px; overflow:visible">mail: <a href="mailto:pdriscoll@eng.ucsd.edu" target="_blank">aali@eng.ucsd.edu</a></font></span></div>
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<blockquote type="cite">On May 17, 2021, at 4:54 PM, Gloria Qiu <gloria.qiu@sydney.edu.au> wrote:<br>
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Hi Natalia,</p>
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I’ve tried dicing 600um sapphire with resin hubless blade at 3mm/sec, 15krmp, and the blades always chip. The manufacturer also recommended depth-step as Ahdam suggested but I haven’t got time to try it. (It would be quite slow though).</p>
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My colleague at UNSW uses a standard procedure (one-step) with VT07/12 blades that I am keen to try. I found the blade and dicing information here and the result looks pretty decent.</p>
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<a href="https://www.aurotech.com/index.php/en/products/dicing-blade/vt07-12-series-detail">https://www.aurotech.com/index.php/en/products/dicing-blade/vt07-12-series-detail</a></p>
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Hope this helps.</p>
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Best,</p>
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Gloria</p>
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<b><span lang="EN-US" style="font-size:8.0pt; font-family:"Arial",sans-serif; color:#538135">Wenlan (Gloria) Qiu</span></b><span lang="EN-US" style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#538135"></span></p>
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<span lang="EN-US" style="font-size:8.0pt; font-family:"Arial",sans-serif; color:#538135">Senior Process Engineer | Research & Prototype Foundry</span><span lang="EN-US" style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#538135"></span></p>
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<span lang="EN-US" style="font-size:8.0pt; font-family:"Arial",sans-serif; color:#538135">Core Research Facilities | Research Portfolio</span><span lang="EN-US" style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#538135"></span></p>
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<b><span lang="EN-US">From:</span></b><span lang="EN-US"> labnetwork <labnetwork-bounces@mtl.mit.edu>
<b>On Behalf Of </b>Ahdam Ali<br>
<b>Sent:</b> Saturday, May 15, 2021 1:12 AM<br>
<b>To:</b> Natalia Pankratova <natalia.a.pankratova@gmail.com><br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Sapphire dicing</span></p>
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Natalia,</p>
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At Nano3, we utilize a Disco DAD3220 Dicing Saw with Hubless blades in order to dice sapphire substrates. The process is relatively fool-proof, but one must be careful with dicing parameters. Cutting glass or sapphire typically require depth steps (multiple
passes along a single cut) as well as very low feed speeds in order to ensure the integrity of the sample. This results in a considerably lower throughput when compared to dicing of a material such as Si.</p>
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Best,</p>
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On Fri, May 14, 2021 at 4:57 AM Natalia Pankratova <<a href="mailto:natalia.a.pankratova@gmail.com">natalia.a.pankratova@gmail.com</a>> wrote:</p>
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Dear All,</p>
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Can you please share your experience on dicing sapphire wafers? Blade dicing or laser? Do you have a favorite dicing brand/model?</p>
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Thank you in advance!</p>
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Best regards,</p>
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Natalia Pankratova.</p>
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<i><span style="font-size:7.5pt">Alice&Bob</span></i></p>
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<i><span style="font-size:7.5pt">Nanofabrication engineer</span></i></p>
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_______________________________________________<br>
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Ahdam Ali</p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222">R&D Engineer II</span></p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222">UCSD Calit2 Nano3 Facility</span></p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222">Atkinson Hall </span><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:black">M/C0436</span><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222"></span></p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:black">La Jolla, CA 92093-0436</span><span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222"></span></p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222">E</span><span style="font-size:10.0pt; font-family:"Georgia",serif; color:#222222">mail:
<a href="mailto:pdriscoll@eng.ucsd.edu" target="_blank"><span style="color:#1155CC">aali@eng.ucsd.edu</span></a></span><span style="font-size:10.0pt; color:#222222"></span></p>
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<span style="font-size:10.0pt; font-family:"Arial",sans-serif; color:#222222">Phone: (<span style="background:white">858)-534-4768</span></span></p>
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