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<p class="MsoNormal">Shane,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">You might wish to consider using LED lighting, you can get a “no blue” light (it looks like white light!) that has none of the problematic wavelengths. I am not familiar with vendors but I’ve tested them in two different photo bay (365
and 405 nm) and measured zero intensity.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards,<o:p></o:p></p>
<p class="MsoNormal">Jeff<o:p></o:p></p>
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<p class="MsoNormal"><b>From:</b> labnetwork <labnetwork-bounces@mtl.mit.edu> <b>
On Behalf Of </b>Xin (Shane) GUO<br>
<b>Sent:</b> Thursday, May 27, 2021 10:03 AM<br>
<b>To:</b> Beaudoin, Mario <beaudoin@physics.ubc.ca><br>
<b>Cc:</b> labnetwork@mtl.mit.edu; fblais@mecart.com; david Arrouart <darrouart@mecart.com>; Michelakis, Kostis <kostis.michelakis@ubc.ca><br>
<b>Subject:</b> Re: [labnetwork] Yellow filters for litho room: what specs are out there?<o:p></o:p></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Arial",sans-serif">Hello Mario,<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Arial",sans-serif">I saw your past post regarding amber UV filter films for the cleanroom. I am in a similar situation looking for UV filter films for our cleanroom lights. Lithoprotect is also
what I have found so far. I am wondering if you have identified suppliers from North America and can share such information with me.<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Arial",sans-serif"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Arial",sans-serif">Best<o:p></o:p></span></p>
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<p style="layout-grid-mode:char"><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Shane Guo, PhD, P.Eng.,</span></b>
<b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">PMP</span></b><br>
<b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">Lab Manager</span></b><br>
<b><span style="font-family:"Arial",sans-serif">York </span></b><b><span style="font-size:10.0pt;font-family:"Arial",sans-serif">MicroFab Facilities (YMF)/ESSE</span></b><br>
<span style="font-size:8.5pt;font-family:"Arial",sans-serif">C 289-588-6605</span><br>
<span style="font-size:8.5pt;font-family:"Arial",sans-serif">T 416-736-2100 ext 44160</span><br>
<a href="mailto:sguo18@yorku.ca" target="_blank"><span style="font-size:8.5pt;font-family:"Arial",sans-serif">sguo18@yorku.ca</span></a><span style="font-size:8.5pt;font-family:"Arial",sans-serif"> |
</span><a href="http://lassonde.yorku.ca/" target="_blank"><span style="font-size:8.5pt;font-family:"Arial",sans-serif">lassonde.yorku.ca</span></a><br>
<span style="font-size:8.5pt;font-family:"Arial",sans-serif">Lassonde School of Engineering |
<span style="text-transform:uppercase">York University</span></span><br>
<span style="font-size:8.5pt;font-family:"Arial",sans-serif">RM037, Bergeron Building</span><br>
<span style="font-size:8.5pt;font-family:"Arial",sans-serif">4700 Keele Street Toronto ON, Canada M3J 1P3</span><o:p></o:p></p>
<p style="layout-grid-mode:char"><span style="font-size:8.5pt;font-family:"Arial",sans-serif;border:solid windowtext 1.0pt;padding:0in"><img border="0" width="101" height="101" style="width:1.05in;height:1.05in" id="Picture_x0020_1" src="cid:~WRD0000.jpg" alt="Image removed by sender."></span><o:p></o:p></p>
<p style="layout-grid-mode:char"><o:p> </o:p></p>
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<p class="MsoNormal">On Thu, Dec 20, 2018 at 8:09 PM Beaudoin, Mario <<a href="mailto:beaudoin@physics.ubc.ca" target="_blank">beaudoin@physics.ubc.ca</a>> wrote:<o:p></o:p></p>
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<p>Dear Labnetworks community,<o:p></o:p></p>
<p>I'm in the process of renovating our cleanroom and want yellow filters that meet the specs of
<i>Lithoprotect</i>, specifically, I want way less than 1% transmission below 500nm.
<i>Lithoprotect</i> (see link below) claims less than 0.001% transmission below about 475nm. In our old cleanroom, we used to have traditional 1% yellow windows that turned out to be inadequate for our maskless lithography system.<o:p></o:p></p>
<p><a href="https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf" target="_blank">https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf</a><o:p></o:p></p>
<p>Does anyone know of a US supplier that offers similar product? On the other hand, does anyone know of products that are not quite as performing but still offer say 0.01% transmission below 500nm? We will be using 405nm and 365nm light with a traditional
mask aligner and a maskless system. We typically use AZ 5214E-IR and nLoF 2020 resists for down to 1um features; some users still use Shipley 1813 and we have another set of groups using SU-8 resists. We're not committed to any supplier but do require tight
performance.<o:p></o:p></p>
<p>I'm cc'ing our cleanroom manufacturer engineers in this thread.<o:p></o:p></p>
<p>Regards,<o:p></o:p></p>
<p>Mario<o:p></o:p></p>
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