<meta http-equiv="Content-Type" content="text/html; charset=utf-8"><div dir="ltr"><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small">Hello Mario,</div><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small">I saw your past post regarding amber UV filter films for the cleanroom. I am in a similar situation looking for UV filter films for our cleanroom lights. Lithoprotect is also what I have found so far. I am wondering if you have identified suppliers from North America and can share such information with me.</div><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small"><br></div><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small">Best</div><div class="gmail_default" style="font-family:arial,sans-serif;font-size:small"><br clear="all"></div><div><div dir="ltr" data-smartmail="gmail_signature"><div dir="ltr">
<p style="line-height:normal;layout-grid-mode:char"><b><span lang="EN-US" style="font-size:10.0pt;line-height:115%;font-family:"IBM Plex Sans",sans-serif">Shane Guo, PhD, P.Eng.,</span></b> <b><span lang="EN-US" style="font-size:10.0pt;line-height:115%;font-family:"IBM Plex Sans",sans-serif">PMP</span></b><br><b><span lang="EN-US" style="font-size:10.0pt;line-height:115%;font-family:"IBM Plex Sans",sans-serif">Lab Manager</span></b><br><b><font face=""IBM Plex Sans",sans-serif">York <span lang="EN-US" style="line-height:115%;font-size:10pt">MicroFab Facilities (YMF)/ESSE</span></font></b><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">C 289-588-6605</span><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">T
416-736-2100 ext 44160</span><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif"><a href="mailto:sguo18@yorku.ca" target="_blank">sguo18@yorku.ca</a> | </span><span lang="EN-US" style="font-size:10.0pt;line-height:115%;font-family:"IBM Plex Sans",sans-serif"><a href="http://lassonde.yorku.ca/" target="_blank"><span style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">lassonde.yorku.ca</span></a></span><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">Lassonde
School of Engineering | </span><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif;text-transform:uppercase">York University</span><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">RM037,
<span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">Bergeron
</span></span><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">Building</span><br><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">4700
Keele Street Toronto ON, Canada </span><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif">M3J
1P3</span></p><p style="line-height:normal;layout-grid-mode:char"><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif"><img src="https://docs.google.com/uc?export=download&id=1yzb0ORQBbcSIkKPmTg25y5gN7cgyYV2Y&revid=0B4SAu99mEQSaOGtHOHViMTN0czhaUFZCMVRIUFl4cTlDL3NzPQ"></span></p><p style="line-height:normal;layout-grid-mode:char"><span lang="EN-US" style="font-size:8.5pt;line-height:115%;font-family:"IBM Plex Sans Text",sans-serif"><br></span></p></div></div></div></div><br><div class="gmail_quote"><div class="gmail_attr" dir="ltr">On Thu, Dec 20, 2018 at 8:09 PM Beaudoin, Mario <<a href="mailto:beaudoin@physics.ubc.ca" target="_blank">beaudoin@physics.ubc.ca</a>> wrote:<br></div><blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;padding-left:1ex;border-left-color:rgb(204,204,204);border-left-width:1px;border-left-style:solid">
<div bgcolor="#FFFFFF">
<p>Dear Labnetworks community,<br>
</p>
<p>I'm in the process of renovating our cleanroom and want yellow
filters that meet the specs of <i>Lithoprotect</i>, specifically,
I want way less than 1% transmission below 500nm. <i>Lithoprotect</i>
(see link below) claims less than 0.001% transmission below about
475nm. In our old cleanroom, we used to have traditional 1%
yellow windows that turned out to be inadequate for our maskless
lithography system.<br>
</p>
<p><a href="https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf" target="_blank">https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf</a></p>
<p>Does anyone know of a US supplier that offers similar product?
On the other hand, does anyone know of products that are not quite
as performing but still offer say 0.01% transmission below 500nm?
We will be using 405nm and 365nm light with a traditional mask
aligner and a maskless system. We typically use AZ 5214E-IR and
nLoF 2020 resists for down to 1um features; some users still use
Shipley 1813 and we have another set of groups using SU-8
resists. We're not committed to any supplier but do require tight
performance.<br>
</p>
<p>I'm cc'ing our cleanroom manufacturer engineers in this thread.</p>
<p>Regards,</p>
<p>Mario<br>
</p>
<div>-- <br>
<img src="cid:179ae1cc805ec49b60d1" border="0"></div>
</div>
_______________________________________________<br>
labnetwork mailing list<br>
<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a><br>
<a href="https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank" rel="noreferrer">https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br>
</blockquote></div>